发明申请
- 专利标题: DRAM cells
- 专利标题(中): DRAM单元
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申请号: US11449433申请日: 2006-06-07
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公开(公告)号: US20060228857A1公开(公告)日: 2006-10-12
- 发明人: Shenlin Chen , Trung Doan , Guy Blalock , Lyle Breiner , Er-Xuan Ping
- 申请人: Shenlin Chen , Trung Doan , Guy Blalock , Lyle Breiner , Er-Xuan Ping
- 主分类号: H01L21/8242
- IPC分类号: H01L21/8242 ; H01L21/20
摘要:
The invention includes a method of forming a rugged semiconductor-containing surface. A first semiconductor layer is formed over a substrate, and a second semiconductor layer is formed over the first semiconductor layer. Subsequently, a third semiconductor layer is formed over the second semiconductor layer, and semiconductor-containing seeds are formed over the third semiconductor layer. The seeds are annealed to form the rugged semiconductor-containing surface. The first, second and third semiconductor layers are part of a common stack, and can be together utilized within a storage node of a capacitor construction. The invention also includes semiconductor structures comprising rugged surfaces. The rugged surfaces can be, for example, rugged silicon.
公开/授权文献
- US07268382B2 DRAM cells 公开/授权日:2007-09-11
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