发明申请
- 专利标题: Exposing substance, exposing method, and exposing device
- 专利标题(中): 曝光物质,曝光方法和曝光装置
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申请号: US10559166申请日: 2004-04-22
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公开(公告)号: US20060229001A1公开(公告)日: 2006-10-12
- 发明人: Helmut Schaefer , Peter Stocker , Oliver Storz
- 申请人: Helmut Schaefer , Peter Stocker , Oliver Storz
- 优先权: DE10323743.7 20030524
- 国际申请: PCT/EP04/04269 WO 20040422
- 主分类号: B24B1/00
- IPC分类号: B24B1/00 ; B24B7/00
摘要:
The invention relates to an uncovering compound for uncovering surfaces of materials with pronounced Si crystals, in particular of cylinder bearing surfaces made from aluminum materials with pronounced Si primary crystals. The uncovering compound according to the invention preferably includes very fine uncovering material, particularly preferably comprising silicon carbide grains with a grain size in the range from 4 μm to 0.1 μm and/or ceramic fibers comprising Al2O3, which is embedded in a visco-elastic plastic carrier compound. The invention also describes a process and a corresponding apparatus in which the uncovering compound according to the invention is used.
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