发明申请
- 专利标题： Optical unit and exposure apparatus having the same
- 专利标题（中）： 光学单元和具有该光学单元的曝光设备
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申请号： US11402059申请日： 2006-04-12
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公开(公告)号： US20060232866A1公开(公告)日： 2006-10-19
- 发明人: Choshoku Sai , Shigeo Sakino , Katsumi Asada , Hirohito Ito , Shinji Uchida
- 申请人： Choshoku Sai , Shigeo Sakino , Katsumi Asada , Hirohito Ito , Shinji Uchida
- 申请人地址： JP Tokyo
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2005-116586 20050414
- 主分类号： G02B7/182
- IPC分类号： G02B7/182
摘要：
An optical unit includes a plate having a fixed position, an optical element having a specific optical action, a fixing device for partially fixing the optical element, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to asymmetrically change a surface shape of the optical element.
公开/授权文献
- US07771065B2 Optical unit and exposure apparatus having the same 公开/授权日：2010-08-10
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