- 专利标题: Micro movable element and optical switching device
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申请号: US11385657申请日: 2006-03-22
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公开(公告)号: US20060233487A1公开(公告)日: 2006-10-19
- 发明人: Hiromitsu Soneda , Xiaoyu Mi , Hisao Okuda , Osamu Tsuboi , Norinao Kouma , Satoshi Ueda
- 申请人: Hiromitsu Soneda , Xiaoyu Mi , Hisao Okuda , Osamu Tsuboi , Norinao Kouma , Satoshi Ueda
- 申请人地址: JP Kawasaki
- 专利权人: FUJITSU LIMITED
- 当前专利权人: FUJITSU LIMITED
- 当前专利权人地址: JP Kawasaki
- 优先权: JP2005-117841 20050415
- 主分类号: G02B6/26
- IPC分类号: G02B6/26
摘要:
A micro movable element includes a micro movable substrate, a package base and an electroconductive connector. The micro movable substrate is provided with a micro movable unit that includes a frame, a pivotally movable portion, a torsion connector connecting the frame and the movable portion, and an actuator to generate driving force for the pivotal motion of the movable portion. The package base includes an internal interconnect structure. The electroconductive connector is provided between the micro movable substrate and the package base for electrically connecting the actuator and the internal interconnect structure to each other.
公开/授权文献
- US07536068B2 Micro movable element and optical switching device 公开/授权日:2009-05-19
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