发明申请
- 专利标题: Hard mask arrangement
- 专利标题(中): 硬面罩布置
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申请号: US11393017申请日: 2006-03-30
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公开(公告)号: US20060234138A1公开(公告)日: 2006-10-19
- 发明人: Rodger Fehlhaber , Helmut Tews
- 申请人: Rodger Fehlhaber , Helmut Tews
- 优先权: DE10345455.1 20030930
- 主分类号: G03F1/00
- IPC分类号: G03F1/00 ; H01L21/311
摘要:
An interconnect connection structure having first and second interconnects and multiple connection elements that electrically connect the first interconnect to the second interconnect is described. The multiple connection elements are formed laterally in a lateral region of the first and second interconnects relative to an overlay orientation of the interconnects. A central region may be free of connection elements so that electro-migration properties of the connection structure are improved and the current-carrying capacity is increased.