发明申请
- 专利标题: Split gate type nonvolatile memory device and method of fabricating the same
- 专利标题(中): 分闸式非易失性存储装置及其制造方法
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申请号: US11413640申请日: 2006-04-28
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公开(公告)号: US20060244042A1公开(公告)日: 2006-11-02
- 发明人: Hee-Seog Jeon , Seung-Beom Yoon , Jeong-Uk Han , Yong-Tae Kim
- 申请人: Hee-Seog Jeon , Seung-Beom Yoon , Jeong-Uk Han , Yong-Tae Kim
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2005-0036006 20050429
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
In a split gate type nonvolatile memory device and a method of fabricating the same. A supplementary layer pattern is disposed on a source region of a semiconductor substrate. Since the source region is vertically extended by virtue of the presence of the supplementary layer pattern, it is therefore possible to increase an area of a region where a floating gate overlaps the source region and the supplementary layer pattern. Accordingly, the capacitance of a capacitor formed between the source and the floating gate increases so that it is possible for the nonvolatile memory device to perform program/erase operations at a low voltage level.
公开/授权文献
- US07429766B2 Split gate type nonvolatile memory device 公开/授权日:2008-09-30
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