发明申请
- 专利标题: Analog data-input device provided with a pressure sensor of a microelectromechanical type
- 专利标题(中): 具有微机电类型的压力传感器的模拟数据输入装置
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申请号: US11393377申请日: 2006-03-30
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公开(公告)号: US20060262088A1公开(公告)日: 2006-11-23
- 发明人: Lorenzo Baldo , Chantal Combi , Simone Sassolini , Marco Del Sarto
- 申请人: Lorenzo Baldo , Chantal Combi , Simone Sassolini , Marco Del Sarto
- 申请人地址: IT Agrate Brianza 20041
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT Agrate Brianza 20041
- 优先权: EP05425183.0 20050331
- 主分类号: G09G5/00
- IPC分类号: G09G5/00
摘要:
In a data-input device an actuator element that can be manually actuated, and a sensor mechanically coupled to the actuator element. The sensor is formed in a body of semiconductor material housing a first sensitive element, which detects the actuation of the actuator element and generates electrical control signals. The first sensitive element is a microelectromechanical pressure sensor, formed by: a cavity made within the body; a diaphragm made in a surface portion of the body and suspended above the cavity; and piezoresistive transducer elements integrated in peripheral surface portions of the diaphragm in order to detect its deformations upon actuation of the actuator element.
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