-
公开(公告)号：US08289021B2
公开(公告)日：2012-10-16
申请号：US12826330
申请日：2010-06-29
IPC分类号： G01R33/02
CPC分类号： G01C17/28 , B82Y25/00 , G01R33/093 , G01R33/096
摘要： A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.
摘要翻译： 一种由具有上表面的半导体材料的衬底上延伸的磁阻材料条形成的磁阻元件。 该条带包括平行于上表面延伸的至少一个平面部分和至少一个横向于上表面的方向延伸的横向部分。 横向部分形成在挖掘的横向壁上。 通过提供垂直于彼此的多个磁阻元件，可以获得对于平行于地球表面的水平面的振荡不敏感的电子罗盘。
-
公开(公告)号：US20120223402A1
公开(公告)日：2012-09-06
申请号：US13446976
申请日：2012-04-13
IPC分类号： H01L29/84
CPC分类号： G01L9/0073 , G01L9/0045
摘要： A capacitive semiconductor pressure sensor, comprising: a bulk region of semiconductor material; a buried cavity overlying a first part of the bulk region; and a membrane suspended above said buried cavity, wherein, said bulk region and said membrane are formed in a monolithic substrate, and in that said monolithic substrate carries structures for transducing the deflection of said membrane into electrical signals, wherein said bulk region and said membrane form electrodes of a capacitive sensing element, and said transducer structures comprise contact structures in electrical contact with said membrane and with said bulk region.
摘要翻译： 一种电容半导体压力传感器，包括：半导体材料的主体区域; 覆盖大块区域的第一部分的掩埋腔; 以及悬浮在所述掩埋腔上方的膜，其中所述体积区域和所述膜形成在整体式衬底中，并且所述整体式衬底承载用于将所述膜的偏转转换成电信号的结构，其中所述体积区域和所述膜 形成电容感测元件的电极，并且所述换能器结构包括与所述膜电连接并与所述体积区域接触的接触结构。
-
3.发明授权Electronic device including MEMS devices and holed substrates, in particular of the LGA or BGA type 有权电子设备包括MEMS器件和带孔衬底，特别是LGA或BGA型公开(公告)号：US08043881B2
公开(公告)日：2011-10-25
申请号：US12969022
申请日：2010-12-15
IPC分类号： H01L29/84
CPC分类号： B81B7/0061 , B81B7/007 , H01L2224/0554 , H01L2224/0557 , H01L2224/05571 , H01L2224/05573 , H01L2224/056 , H01L2224/16225 , H01L2224/48091 , H01L2924/00014 , H01L2924/1461 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要： An electronic device includes a substrate provided with a passing opening and a MEMS device including an active surface wherein a portion of the MEMS device is integrated sensitive to chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the opening. A protective package incorporates at least partially the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device, and the opening of the substrate exposed. A barrier element is positioned in an area which surrounds the sensitive portion to realize a protection structure for the MEMS device, so that the sensitive portion is free.
摘要翻译： 电子设备包括设置有通过开口的基板和包括活性表面的MEMS器件，其中MEMS器件的一部分对流体的化学/物理变化敏感。 MEMS器件的有源表面面向衬底并与其间隔开，敏感部分与开口对准。 保护封装至少部分地包括MEMS器件和衬底，至少留下MEMS器件的敏感部分，并暴露衬底的开口。 屏障元件位于围绕敏感部分的区域中，以实现用于MEMS器件的保护结构，使得敏感部分是自由的。
-
4.发明申请ELECTRONIC DEVICE, SYSTEM, AND METHOD COMPRISING DIFFERENTIAL SENSOR MEMS DEVICES AND DRILLED SUBSTRATES 有权包含差分传感器MEMS器件和钻孔基板的电子设备，系统和方法公开(公告)号：US20090278215A1
公开(公告)日：2009-11-12
申请号：US12508869
申请日：2009-07-24
CPC分类号： B81B7/0061 , B81B2201/0257 , B81B2201/0264 , B81C2203/0154 , G01L19/141 , G01L19/147 , G01L19/148 , H01L2224/48091 , H01L2224/48247 , H01L2924/10253 , H01L2924/1461 , H01L2924/00014 , H01L2924/00
摘要： Electronic device which comprises a substrate provided with at least one passing opening, a MEMS device with function of differential sensor provided with a first and a second surface and of the type comprising at least one portion sensitive to chemical and/or physical variations of fluids present in correspondence with a first and a second opposed active surface thereof, the first surface of the MEMS device leaving the first active surface exposed and the second surface being provided with a further opening which exposes said second opposed active surface, the electronic device being characterized in that the first surface of the MEMS device faces the substrate and is spaced therefrom by a predetermined distance, the sensitive portion being aligned to the passing opening of the substrate, and in that it also comprises a protective package, which incorporates at least partially the MEMS device and the substrate so as to leave the first and second opposed active surfaces exposed respectively through the passing opening of the substrate and the further opening of the second surface.
摘要翻译： 电子设备，其包括设置有至少一个通过开口的基板，具有差分传感器的功能的MEMS装置，其具有第一和第二表面，并且所述MEMS装置包括对存在的流体的化学和/或物理变化敏感的至少一个部分 与其第一和第二相对的有效表面对应，离开第一有源表面的MEMS器件的第一表面暴露，并且第二表面设置有暴露所述第二相对有效表面的另一开口，电子器件的特征在于 MEMS器件的第一表面面向衬底并与之隔开预定距离，敏感部分与衬底的通过开口对准，并且还包括保护封装，其至少部分地与MEMS 装置和基板，以使第一和第二相对的有效表面暴露出来 通过基板的通过开口和第二表面的进一步打开。
-
5.发明申请SUBSTRATE-LEVEL ASSEMBLY FOR AN INTEGRATED DEVICE, MANUFACTURING PROCESS THEREOF AND RELATED INTEGRATED DEVICE 有权集成器件的基板级组件及其制造工艺及相关的集成器件公开(公告)号：US20080315333A1
公开(公告)日：2008-12-25
申请号：US12102709
申请日：2008-04-14
申请人： Chantal Combi , Benedetto Vigna , Federico Giovanni Ziglioli , Lorenzo Baldo , Manuela Magugliani , Ernesto Lasalandra , Caterina Riva
发明人： Chantal Combi , Benedetto Vigna , Federico Giovanni Ziglioli , Lorenzo Baldo , Manuela Magugliani , Ernesto Lasalandra , Caterina Riva
CPC分类号： B81B7/0061 , B81B7/02 , B81B2201/0235 , B81B2201/0264 , B81C1/0023 , H01L2224/48091 , H01L2224/73265 , H01L2924/1461 , H01L2924/3025 , H04R1/04 , H04R19/005 , H01L2924/00014 , H01L2924/00
摘要： A substrate-level assembly having a device substrate of semiconductor material with a top face and housing a first integrated device, including a buried cavity formed within the device substrate, and with a membrane suspended over the buried cavity in the proximity of the top face. A capping substrate is coupled to the device substrate above the top face so as to cover the first integrated device in such a manner that a first empty space is provided above the membrane. Electrical-contact elements electrically connect the integrated device with the outside of the substrate-level assembly. In one embodiment, the device substrate integrates at least a further integrated device provided with a respective membrane, and a further empty space, fluidically isolated from the first empty space, is provided over the respective membrane of the further integrated device.
摘要翻译： 一种基板级组件，其具有具有顶面的半导体材料的器件基板并且容纳第一集成器件，所述第一集成器件包括形成在所述器件衬底内的掩埋腔，以及悬挂在所述顶面附近的所述掩埋腔上的膜。 封盖衬底在顶面上方连接到器件衬底，以便以这样的方式覆盖第一集成器件，使得在膜上方设置第一空白空间。 电接触元件将集成器件与衬底级组件的外部电连接。 在一个实施例中，器件衬底集成了至少一个设置有相应膜的集成器件，并且在另一个集成器件的相应膜上提供了与第一空白空间流体隔离的另外的空白空间。
-
公开(公告)号：US20080261345A1
公开(公告)日：2008-10-23
申请号：US12163110
申请日：2008-06-27
IPC分类号： H01L21/00
CPC分类号： G01L9/0073 , G01L9/0045
摘要： Method for manufacturing a semiconductor pressure sensor, wherein, in a silicon substrate, trenches are dug and delimit walls; a closing layer is epitaxially grown, that closes the trenches at the top and forms a suspended membrane; a heat treatment is performed so as to cause migration of the silicon of the walls and to form a closed cavity underneath the suspended membrane; and structures are formed for transducing the deflection of the suspended membrane into electrical signals.
摘要翻译： 制造半导体压力传感器的方法，其中在硅衬底中，挖沟和界定壁; 闭合层外延生长，封闭顶部的沟槽并形成悬浮膜; 进行热处理以使壁的硅迁移并在悬浮膜下方形成封闭空腔; 并且形成用于将悬浮膜的偏转转换成电信号的结构。
-
7.发明授权BMEMS-type high-sensitivity inertial sensor and manufacturing process thereof 有权MEMS型高灵敏度惯性传感器及其制造工艺公开(公告)号：US07270003B2
公开(公告)日：2007-09-18
申请号：US11189544
申请日：2005-07-25
申请人： Simone Sassolini , Marco Del Sarto , Lorenzo Baldo , Mauro Marchi
发明人： Simone Sassolini , Marco Del Sarto , Lorenzo Baldo , Mauro Marchi
IPC分类号： G01P15/125 , G01C19/00
CPC分类号： G01C19/5755 , G01C19/5769
摘要： The semiconductor inertial sensor is formed by a rotor element and a stator element electrostatically coupled together. The rotor element is formed by a suspended mass and by a plurality of mobile electrodes extending from the suspended mass. The stator element is formed by a plurality of fixed electrodes facing respective mobile electrodes. The suspended mass is supported by elastic suspension elements. The suspended mass has a first, larger, thickness, and the elastic suspension elements have a second thickness, smaller than the first thickness.
摘要翻译： 半导体惯性传感器由静电耦合在一起的转子元件和定子元件形成。 转子元件由悬挂质量和从悬浮物质延伸的多个移动电极形成。 定子元件由面对各自的移动电极的多个固定电极形成。 悬挂质量由弹性悬挂元件支撑。 悬挂质量具有第一，较大的厚度，并且弹性悬挂元件具有小于第一厚度的第二厚度。
-
8.发明申请ANALOG INPUT DEVICE WITH INTEGRATED PRESSURE SENSOR AND ELECTRONIC APPARATUS EQUIPPED WITH SAID INPUT DEVICE 有权具有集成压力传感器的模拟输入设备和配备有输入设备的电子设备公开(公告)号：US20070068779A1
公开(公告)日：2007-03-29
申请号：US11530170
申请日：2006-09-08
申请人： Lorenzo Baldo , Chantal Combi , Dino Faralli
发明人： Lorenzo Baldo , Chantal Combi , Dino Faralli
CPC分类号： G01L5/223 , G06F3/0338 , Y10T29/49105 , Y10T29/49169
摘要： In an input device, a control element is operated by a user; a pressure sensor is mechanically coupled to the control element and is provided with a monolithic body of semiconductor material housing a first sensitive element, which detects an actuation of the control element; a supporting element is connected to the pressure sensor; and connection elements electrically connect the monolithic body to the supporting element without interposition of a package. In particular, the monolithic body has electrical-contact areas carried by one main surface thereof, and the printed circuit board has conductive regions carried by a main face thereof; the connection elements are conductive bumps and electrically connect the electrical-contact areas to the conductive regions.
摘要翻译： 在输入装置中，控制元件由用户操作; 压力传感器机械耦合到控制元件并且设置有容纳第一敏感元件的半导体材料的整体体，第一敏感元件检测控制元件的致动; 支撑元件连接到压力传感器; 并且连接元件将整体体电连接到支撑元件而不插入封装。 特别地，整体式主体具有由其主表面承载的电接触区域，并且印刷电路板具有由其主面承载的导电区域; 连接元件是导电凸块并将电接触区域电连接到导电区域。
-
9.发明申请BMEMS-type high-sensitivity inertial sensor and manufacturing process thereof 有权MEMS型高灵敏度惯性传感器及其制造工艺公开(公告)号：US20060042385A1
公开(公告)日：2006-03-02
申请号：US11189544
申请日：2005-07-25
申请人： Simone Sassolini , Marco Del Sarto , Lorenzo Baldo , Mauro Marchi
发明人： Simone Sassolini , Marco Del Sarto , Lorenzo Baldo , Mauro Marchi
IPC分类号： G01P15/08 , H01L21/308
CPC分类号： G01C19/5755 , G01C19/5769
摘要： The semiconductor inertial sensor is formed by a rotor element and a stator element electrostatically coupled together. The rotor element is formed by a suspended mass and by a plurality of mobile electrodes extending from the suspended mass. The stator element is formed by a plurality of fixed electrodes facing respective mobile electrodes. The suspended mass is supported by elastic suspension elements. The suspended mass has a first, larger, thickness, and the elastic suspension elements have a second thickness, smaller than the first thickness.
摘要翻译： 半导体惯性传感器由静电耦合在一起的转子元件和定子元件形成。 转子元件由悬挂质量和从悬浮物质延伸的多个移动电极形成。 定子元件由面对各自的移动电极的多个固定电极形成。 悬挂质量由弹性悬挂元件支撑。 悬挂质量具有第一，较大的厚度，并且弹性悬挂元件具有小于第一厚度的第二厚度。
-
10.发明授权Electronic device, system, and method comprising differential sensor MEMS devices and drilled substrates 有权电子设备，系统和方法包括差分传感器MEMS器件和钻孔基板公开(公告)号：US08134214B2
公开(公告)日：2012-03-13
申请号：US12508869
申请日：2009-07-24
IPC分类号： H01L29/84
CPC分类号： B81B7/0061 , B81B2201/0257 , B81B2201/0264 , B81C2203/0154 , G01L19/141 , G01L19/147 , G01L19/148 , H01L2224/48091 , H01L2224/48247 , H01L2924/10253 , H01L2924/1461 , H01L2924/00014 , H01L2924/00
摘要： Electronic device which comprises a substrate provided with at least one passing opening, a MEMS device with function of differential sensor provided with a first and a second surface and of the type comprising at least one portion sensitive to chemical and/or physical variations of fluids present in correspondence with a first and a second opposed active surface thereof, the first surface of the MEMS device leaving the first active surface exposed and the second surface being provided with a further opening which exposes said second opposed active surface, the electronic device being characterized in that the first surface of the MEMS device faces the substrate and is spaced therefrom by a predetermined distance, the sensitive portion being aligned to the passing opening of the substrate, and in that it also comprises a protective package, which incorporates at least partially the MEMS device and the substrate so as to leave the first and second opposed active surfaces exposed respectively through the passing opening of the substrate and the further opening of the second surface.
摘要翻译： 电子设备，其包括设置有至少一个通过开口的基板，具有差分传感器的功能的MEMS装置，其具有第一和第二表面，并且所述MEMS装置包括对存在的流体的化学和/或物理变化敏感的至少一个部分 与其第一和第二相对的有效表面对应，离开第一有源表面的MEMS器件的第一表面暴露，并且第二表面设置有暴露所述第二相对有效表面的另一开口，电子器件的特征在于 MEMS器件的第一表面面向衬底并与之隔开预定距离，敏感部分与衬底的通过开口对准，并且还包括保护封装，其至少部分地与MEMS 装置和基板，以使第一和第二相对的有效表面暴露出来 通过基板的通过开口和第二表面的进一步打开。
-
-
-
-
-
-
-
-
-
搜索结果
51 条记录 (耗时 0.021 秒)
