发明申请
- 专利标题: Semiconductor photodetector and photodetecting device
- 专利标题(中): 半导体光电探测器和光电探测器
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申请号: US11429454申请日: 2006-05-08
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公开(公告)号: US20060267126A1公开(公告)日: 2006-11-30
- 发明人: Yoshimaro Fujii , Kouji Okamoto , Akira Sakamoto
- 申请人: Yoshimaro Fujii , Kouji Okamoto , Akira Sakamoto
- 专利权人: HAMAMATSU PHOTONICKS K.K.
- 当前专利权人: HAMAMATSU PHOTONICKS K.K.
- 优先权: JPP2004-105590 20040331
- 主分类号: H01L31/0203
- IPC分类号: H01L31/0203
摘要:
A semiconductor photodetector 10 has a first semiconductor substrate 1 that is of a first conductive type and a low resistivity and has a (111) front surface, and a second semiconductor substrate 2 that is of the first conductive type and a high resistivity, has a (100) front surface, and is adhered onto first semiconductor substrate 1. A semiconductor region 3 of a second conductive type is formed on the front surface side of second semiconductor substrate 2. A region of a periphery of semiconductor region 3 is etched until first semiconductor substrate 1 is exposed. A first electrode 1e and a second electrode 2e are electrically connected to the exposed front surface of first semiconductor substrate 1 and to semiconductor region 3, respectively.
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