发明申请
- 专利标题: Methods for manufacturing integrated circuits
- 专利标题(中): 集成电路制造方法
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申请号: US11147600申请日: 2005-06-07
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公开(公告)号: US20060272574A1公开(公告)日: 2006-12-07
- 发明人: Andrew Waite , Scott Luning
- 申请人: Andrew Waite , Scott Luning
- 专利权人: ADVANCED MICRO DEVICES, INC.
- 当前专利权人: ADVANCED MICRO DEVICES, INC.
- 主分类号: C30B23/00
- IPC分类号: C30B23/00 ; C30B25/00 ; C30B28/12 ; C30B28/14
摘要:
Methods for manufacturing an integrated circuit are provided. An exemplary method comprises the step of providing a silicon substrate having a first crystalline orientation. A silicon layer having a second crystalline orientation is bonded to the silicon substrate. The second crystalline orientation is different from the first crystalline orientation. The silicon layer is etched to expose a portion of the silicon substrate and an amorphous silicon layer is deposited on the exposed portion. The amorphous silicon layer is transformed into a regrown crystalline silicon layer having the first crystalline orientation. A first field effect transistor is formed on the silicon layer and a second field effect transistor is formed on the regrown crystalline silicon layer.
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