Invention Application
US20060272673A1 Method and apparatus for cleaning and surface conditioning objects using plasma
有权
使用等离子体清洁和表面调理物体的方法和设备
- Patent Title: Method and apparatus for cleaning and surface conditioning objects using plasma
- Patent Title (中): 使用等离子体清洁和表面调理物体的方法和设备
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Application No.: US11142988Application Date: 2005-06-02
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Publication No.: US20060272673A1Publication Date: 2006-12-07
- Inventor: Peter Kurunczi
- Applicant: Peter Kurunczi
- Assignee: Cerionx, Inc.
- Current Assignee: Cerionx, Inc.
- Main IPC: B08B6/00
- IPC: B08B6/00 ; C23F1/00

Abstract:
A method and apparatus for cleaning and surface conditioning objects using plasma are disclosed. One embodiment of the method discloses providing a plurality of elongated dielectric barrier members arranged adjacent each other, the elongated dielectric barrier members having electrodes coupled therein, providing a ground plane, introducing the objects proximate the elongated dielectric barrier members and the ground plane, and producing a dielectric barrier discharge to form plasma between the ground plane and the elongated dielectric barrier members for cleaning the objects. One embodiment of the apparatus for cleaning objects using plasma discloses a plurality of elongated dielectric barrier members arranged adjacent each other, a plurality of electrodes, each contained within, and extending substantially along the length of, respective ones of the elongated dielectric barrier members, and a ground plane proximate the plurality of elongated dielectric barrier members.
Public/Granted literature
- US08092643B2 Method and apparatus for cleaning and surface conditioning objects using plasma Public/Granted day:2012-01-10
Information query
IPC分类: