发明申请
US20060275692A1 Method for forming concavo-convex pattern, method for manufacturing master disk, method for manufacturing stamper, and method for manufacturing magnetic recording medium
审中-公开
用于形成凹凸图案的方法,用于制造母盘的方法,用于制造压模的方法以及制造磁记录介质的方法
- 专利标题: Method for forming concavo-convex pattern, method for manufacturing master disk, method for manufacturing stamper, and method for manufacturing magnetic recording medium
- 专利标题(中): 用于形成凹凸图案的方法,用于制造母盘的方法,用于制造压模的方法以及制造磁记录介质的方法
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申请号: US11445336申请日: 2006-06-02
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公开(公告)号: US20060275692A1公开(公告)日: 2006-12-07
- 发明人: Shuichi Okawa , Katsuyuki Nakada , Kazuhiro Hattori , Mitsuru Takai
- 申请人: Shuichi Okawa , Katsuyuki Nakada , Kazuhiro Hattori , Mitsuru Takai
- 申请人地址: JP Tokyo
- 专利权人: TDK CORPORATION
- 当前专利权人: TDK CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2005-162680 20050602; JP2005-244804 20050825
- 主分类号: G03C5/00
- IPC分类号: G03C5/00
摘要:
A method for forming a concavo-convex pattern that can form a fine and complex concavo-convex pattern such as that corresponding to servo information with high precision, a method for manufacturing a master disk, a method for manufacturing a stamper, and a method for manufacturing a magnetic recording medium using that method for forming a concavo-convex pattern are provided. A resin layer formed over a resin layer supporting member is processed into an irregular concavo-convex pattern in which a dividing convex portion is formed in a part of concave portions of a predetermined basic concavo-convex pattern and at least some of concave portions are divided as compared with corresponding concave portions of the basic concavo-convex pattern. A recording layer (the resin layer supporting member) is etched based on the resin layer to be processed into a concavo-convex pattern obtained by bringing the irregular concavo-convex pattern close to the basic concavo-convex pattern.
公开/授权文献
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