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1.发明授权Mask forming method, mask forming functional layer, dry etching method, and method of manufacturing an information recording medium 失效掩模形成方法，掩模形成功能层，干蚀刻方法和信息记录介质的制造方法公开(公告)号：US07531103B2
公开(公告)日：2009-05-12
申请号：US10947289
申请日：2004-09-23
IPC分类号： B44C1/22
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10T428/24802
摘要： A mask forming method forms an A mask forming functional layer with an amorphous structure so as to cover an etched body, forms a B mask forming functional layer so as to cover the formed A mask forming functional layer, forms a convex/concave pattern in the formed B mask forming functional layer by carrying out a predetermined process to form a B mask on the A mask forming functional layer, and forms an A mask on the etched body by forming a convex/concave pattern in the A mask forming functional layer by dry etching the A mask forming functional layer using the B mask. By doing so, a convex/concave pattern with extremely small pattern fluctuations can be formed in the A mask forming functional layer.
摘要翻译： 掩模形成方法形成具有非晶结构的A掩模形成功能层以覆盖蚀刻体，形成B掩模形成功能层，以覆盖所形成的A掩模形成功能层，在其中形成凸/凹图案 通过在A掩模形成功能层上进行预定处理以形成B掩模形成B掩模形成功能层，并且通过在A掩模形成功能层中通过干燥形成凸/凹图案在蚀刻体上形成A掩模 使用B掩模蚀刻形成A掩模的功能层。 通过这样做，可以在A掩模形成功能层中形成具有极小图案波动的凸/凹图案。
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2.发明申请Magnetic recording medium, magnetic recording and reproducing apparatus, stamper, method of manufacturing stamper, and method of manufacturing magnetic recording medium 审中-公开磁记录介质，磁记录和再现装置，压模，压模制造方法以及制造磁记录介质的方法公开(公告)号：US20060269791A1
公开(公告)日：2006-11-30
申请号：US11442258
申请日：2006-05-30
摘要： A magnetic recording medium which has a recording layer of concavo-convex pattern and has high production efficiency, a magnetic recording and reproducing apparatus which has the magnetic recording medium, a stamper for manufacturing the magnetic recording medium, a method of manufacturing the stamper, and a method of manufacturing the magnetic recording medium are provided. Part of servo areas of the recording layer are formed in an irregular servo concavo-convex pattern in which at least some of either concave portions or convex portions are divided in a radial direction as compared with those of a basic servo concavo-convex pattern, the basic servo concavo-convex pattern having concave portions consisting of concave unit areas corresponding to cell areas for recording either an information on 0 or an information on 1, and convex portions consisting of convex unit areas corresponding to the other cell areas for recording the other information.
摘要翻译： 具有凹凸图案的记录层并且具有高生产效率的磁记录介质，具有磁记录介质的磁记录和再现装置，用于制造磁记录介质的压模，制造压模的方法和 提供了制造磁记录介质的方法。 记录层的伺服区域的一部分形成为不规则的伺服凹凸图案，其中与基本伺服凹凸图案相比，凹部或凸部中的至少一些在径向方向上分开， 基本的伺服凹凸图案，具有由对应于用于记录关于0的信息的单元区域的凹部单元区域或与1对应的信息组成的凹部，以及由对应于其他单元区域的凸单位区域构成的凸部，用于记录其他信息 。
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3.发明申请Mask forming method, mask forming functional layer, dry etching method, and method of manufacturing an information recording medium 失效掩模形成方法，掩模形成功能层，干蚀刻方法和信息记录介质的制造方法公开(公告)号：US20050067371A1
公开(公告)日：2005-03-31
申请号：US10947289
申请日：2004-09-23
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10T428/24802
摘要： A mask forming method forms an A mask forming functional layer with an amorphous structure so as to cover an etched body, forms a B mask forming functional layer so as to cover the formed A mask forming functional layer, forms a convex/concave pattern in the formed B mask forming functional layer by carrying out a predetermined process to form a B mask on the A mask forming functional layer, and forms an A mask on the etched body by forming a convex/concave pattern in the A mask forming functional layer by dry etching the A mask forming functional layer using the B mask. By doing so, a convex/concave pattern with extremely small pattern fluctuations can be formed in the A mask forming functional layer.
摘要翻译： 掩模形成方法形成具有非晶结构的A掩模形成功能层以覆盖蚀刻体，形成B掩模形成功能层，以覆盖所形成的A掩模形成功能层，在其中形成凸/凹图案 通过在A掩模形成功能层上进行预定处理以形成B掩模形成B掩模形成功能层，并且通过在A掩模形成功能层中通过干燥形成凸/凹图案在蚀刻体上形成A掩模 使用B掩模蚀刻形成A掩模的功能层。 通过这样做，可以在A掩模形成功能层中形成具有极小图案波动的凸/凹图案。
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4.发明申请Method for forming concavo-convex pattern, method for manufacturing master disk, method for manufacturing stamper, and method for manufacturing magnetic recording medium 审中-公开用于形成凹凸图案的方法，用于制造母盘的方法，用于制造压模的方法以及制造磁记录介质的方法公开(公告)号：US20060275692A1
公开(公告)日：2006-12-07
申请号：US11445336
申请日：2006-06-02
IPC分类号： G03C5/00
CPC分类号： G11B5/855
摘要： A method for forming a concavo-convex pattern that can form a fine and complex concavo-convex pattern such as that corresponding to servo information with high precision, a method for manufacturing a master disk, a method for manufacturing a stamper, and a method for manufacturing a magnetic recording medium using that method for forming a concavo-convex pattern are provided. A resin layer formed over a resin layer supporting member is processed into an irregular concavo-convex pattern in which a dividing convex portion is formed in a part of concave portions of a predetermined basic concavo-convex pattern and at least some of concave portions are divided as compared with corresponding concave portions of the basic concavo-convex pattern. A recording layer (the resin layer supporting member) is etched based on the resin layer to be processed into a concavo-convex pattern obtained by bringing the irregular concavo-convex pattern close to the basic concavo-convex pattern.
摘要翻译： 一种用于形成能够以高精度形成与伺服信息相对应的精细复杂凹凸图案的凹凸图案的方法，制造母盘的方法，制造压模的方法，以及用于 制造使用这种形成凹凸图案的方法的磁记录介质。 形成在树脂层支撑构件上的树脂层被加工成不规则的凹凸图案，其中在预定的基本凹凸图案的凹部的一部分中形成有分割凸部，并且至少部分凹部被分割 与基本凹凸图案的相应凹部相比较。 基于要加工的树脂层将记录层（树脂层支撑构件）蚀刻成通过使不规则凹凸图案接近基本凹凸图案而获得的凹凸图案。
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公开(公告)号：US20050138803A1
公开(公告)日：2005-06-30
申请号：US10974834
申请日：2004-10-28
IPC分类号： B29C33/38 , B29L17/00 , B41C3/06 , C23F1/00 , C25D1/00 , G11B5/855 , G11B7/26 , B29C35/00 , A01J21/00 , H05K1/03
CPC分类号： G11B5/855 , B41C3/06 , G11B7/263 , Y10T29/49155
摘要： In a stamper which is used as a mold for pattern transfer, the problem is resolved in such a manner that at least the convex extreme surface of the stamper is formed of a material 110 with no crystalline peak in X-ray diffraction. Such a stamper can be manufactured by the method comprising the steps of forming a convex-concave pattern on a substrate, forming, on the convex-concave pattern, a layer of a material 110 with no crystalline peak in X-ray diffraction, and removing the layer of the material with no crystalline peak in X-ray diffraction from said substrate and convex-concave pattern in intimate contact with the layer.
摘要翻译： 在用作图案转印用模具的压模中，解决了这样的问题，即，在X射线衍射中，至少压模的凸极的表面由材料110形成，没有结晶峰。 这样的压模可以通过以下方法制造：包括以下步骤：在基板上形成凸凹图案，在凸凹图案上形成在X射线衍射中没有结晶峰的材料层110，以及去除 在与所述基底的X射线衍射中没有结晶峰的材料层和与该层紧密接触的凸凹图案。
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6.发明授权Pattern drawing method, stamper manufacturing method, and pattern drawing apparatus 失效图案绘制方法，压模制造方法和图案描绘装置公开(公告)号：US07388215B2
公开(公告)日：2008-06-17
申请号：US11457545
申请日：2006-07-14
CPC分类号： H01J37/3026 , B82Y10/00 , B82Y40/00 , G11B5/82 , G11B5/855 , H01J37/3174
摘要： A pattern drawing method capable of drawing a pattern such that opposite ends of a formation region on an inner periphery side and an outer periphery side are substantially linearly formed. A drawing beam is intermittently irradiated N times onto a generally belt-shaped exposure area extending in a direction of rotation of the substrate from one end to the other end of the belt-shaped exposure area in the direction of rotation of the substrate, the belt-shaped exposure area being defined within a formation region, in which one of the convex or concave portions is to be formed, to thereby irradiate the drawing beam onto N generally belt-shaped irradiation areas extending in the direction of rotation of the substrate.
摘要翻译： 一种图形绘制方法，其能够绘制使内周侧和外周侧的形成区域的相对端基本线性地形成的图案。 拉伸梁被间歇地照射N次到沿着基板的旋转方向延伸的大致带状的曝光区域，从基板的旋转方向的带状曝光区域的一端到另一端，带 形状的曝光区域被限定在其中要形成一个凸部或凹部的形成区域内，从而将拉伸光束照射到在基板的旋转方向上延伸的N个大致带状的照射区域上。
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7.发明申请PATTERN DRAWING METHOD, STAMPER MANUFACTURING METHOD, AND PATTERN DRAWING APPARATUS 失效图案绘图方法，冲压器制造方法和图案绘图装置公开(公告)号：US20070023704A1
公开(公告)日：2007-02-01
申请号：US11457545
申请日：2006-07-14
IPC分类号： G21K5/10
CPC分类号： H01J37/3026 , B82Y10/00 , B82Y40/00 , G11B5/82 , G11B5/855 , H01J37/3174
摘要： A pattern drawing method capable of drawing a pattern such that opposite ends of a formation region on an inner periphery side and an outer periphery side are substantially linearly formed. A drawing beam is intermittently irradiated N times onto a generally belt-shaped exposure area extending in a direction of rotation of the substrate from one end to the other end of the belt-shaped exposure area in the direction of rotation of the substrate, the belt-shaped exposure area being defined within a formation region, in which one of the convex or concave portions is to be formed, to thereby irradiate the drawing beam onto N generally belt-shaped irradiation areas extending in the direction of rotation of the substrate.
摘要翻译： 一种图形绘制方法，其能够绘制使内周侧和外周侧的形成区域的相对端基本线性地形成的图案。 拉伸梁被间歇地照射N次到沿着基板的旋转方向延伸的大致带状的曝光区域，从基板的旋转方向的带状曝光区域的一端到另一端，带 形状的曝光区域被限定在其中要形成一个凸部或凹部的形成区域内，从而将拉伸光束照射到在基板的旋转方向上延伸的N个大致带状的照射区域上。
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公开(公告)号：US07417826B2
公开(公告)日：2008-08-26
申请号：US10805354
申请日：2004-03-22
IPC分类号： G11B5/714
CPC分类号： B82Y10/00 , G11B5/584 , G11B5/59633 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855 , Y10T428/12465
摘要： A magnetic recording medium on which servo information is recorded efficiently with a sufficient output amplitude for favorable read accuracy of the servo information. In servo areas, a magnetic layer is separated into a plurality of servo pattern unit parts forming a predetermined servo pattern and servo pattern peripheral parts/part surrounding the servo pattern unit parts. The servo pattern unit parts and the servo pattern peripheral parts/part are formed in different sizes so as to have different magnetic properties.
摘要翻译： 一种以足够的输出幅度有效地记录伺服信息的磁记录介质，以获得伺服信息的良好的读取精度。 在伺服区域中，磁性层被分成形成预定的伺服模式的多个伺服图案单元部分和围绕伺服图案单元部分的伺服模式外围部分/部分。 伺服图案单元部件和伺服图形周边部件/部件形成为不同的尺寸，以具有不同的磁性。
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公开(公告)号：US20050079448A1
公开(公告)日：2005-04-14
申请号：US10925038
申请日：2004-08-25
CPC分类号： G11B5/855 , G03F7/0017
摘要： A material having an amorphous structure is used as a ground material on which a resist layer is applied. After the resist layer is irradiated with an exposure electron beam to form latent images, the latent images are developed so that a predetermined line-and-space pattern is formed in the resist layer.
摘要翻译： 使用具有非晶结构的材料作为施加抗蚀剂层的研磨材料。 在用曝光电子束照射抗蚀剂层以形成潜像之后，潜像显影，使得在抗蚀剂层中形成预定的线间距图案。
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公开(公告)号：US07225528B2
公开(公告)日：2007-06-05
申请号：US10972325
申请日：2004-10-26
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
CPC分类号： G11B5/855 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.
摘要翻译： 一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。 该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。 至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率 用于形成较低的非磁性膜。
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