发明申请
US20060278957A1 FABRICATION OF SEMICONDUCTOR INTEGRATED CIRCUIT CHIPS 审中-公开
半导体集成电路芯片的制造

FABRICATION OF SEMICONDUCTOR INTEGRATED CIRCUIT CHIPS
摘要:
A semiconductor wafer includes a plurality of active circuit die areas, each of which being bordered by a dicing line region through which the plurality of active circuit die areas are separated from each other, wherein each of the plurality of active circuit die areas has substantially four corners. An overcoat is deposited to cover both the active circuit die areas and the dicing line region. A first trench is formed by etching through the overcoat and disposed merely around the four corners of each active circuit die area. A reinforcing second trench is etched into the overcoat and is disposed in proximity to the first trench. A die seal ring is disposed in between the active circuit chip area and the first trench.
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