发明申请
- 专利标题: FABRICATION OF SEMICONDUCTOR INTEGRATED CIRCUIT CHIPS
- 专利标题(中): 半导体集成电路芯片的制造
-
申请号: US11160106申请日: 2005-06-09
-
公开(公告)号: US20060278957A1公开(公告)日: 2006-12-14
- 发明人: Zong-Huei Lin , Hung-Min Liu , Jui-Meng Jao , Wen-Tung Chang , Kuo-Ming Chen , Kai-Kuang Ho
- 申请人: Zong-Huei Lin , Hung-Min Liu , Jui-Meng Jao , Wen-Tung Chang , Kuo-Ming Chen , Kai-Kuang Ho
- 主分类号: H01L23/544
- IPC分类号: H01L23/544
摘要:
A semiconductor wafer includes a plurality of active circuit die areas, each of which being bordered by a dicing line region through which the plurality of active circuit die areas are separated from each other, wherein each of the plurality of active circuit die areas has substantially four corners. An overcoat is deposited to cover both the active circuit die areas and the dicing line region. A first trench is formed by etching through the overcoat and disposed merely around the four corners of each active circuit die area. A reinforcing second trench is etched into the overcoat and is disposed in proximity to the first trench. A die seal ring is disposed in between the active circuit chip area and the first trench.
信息查询
IPC分类: