发明申请
US20060289383A1 Composition for removing conductive materials and manufacturing method of array substrate using the same
有权
用于除去导电材料的组合物及使用其的阵列基板的制造方法
- 专利标题: Composition for removing conductive materials and manufacturing method of array substrate using the same
- 专利标题(中): 用于除去导电材料的组合物及使用其的阵列基板的制造方法
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申请号: US11452387申请日: 2006-06-14
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公开(公告)号: US20060289383A1公开(公告)日: 2006-12-28
- 发明人: Kye-Chan Song , Jong Kim , Kyoung-Mook Lee , Sam-Young Cho , Hyun-Cheol Kim , Nam-Seo Kim
- 申请人: Kye-Chan Song , Jong Kim , Kyoung-Mook Lee , Sam-Young Cho , Hyun-Cheol Kim , Nam-Seo Kim
- 优先权: JP10-2005-0056493 20050628
- 主分类号: C30B33/00
- IPC分类号: C30B33/00 ; C09K13/06 ; C09K13/00 ; B44C1/22
摘要:
A composition for removing a conductive material and a manufacturing method of an array substrate using the composition, wherein the composition may include a nitric acid of about 3 to 15 wt %, a phosphoric acid of about 40 to 70 wt %, an acetic acid of about 5 to 35 wt %. The composition may further include a chlorine compound of about 0.05 to 5 wt %, a chlorine stabilizer of about 0.01 to 5 wt %, a pH stabilizer of about 0.01 to 5 wt %, and water of residual quantity.
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