发明申请
- 专利标题: Micro-embossing fabrication of electronic devices
- 专利标题(中): 电子器件的微压花加工
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申请号: US11453974申请日: 2006-06-16
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公开(公告)号: US20060290021A1公开(公告)日: 2006-12-28
- 发明人: Shunpu Li , Christopher Newsome , David Russell , Thomas Kugler
- 申请人: Shunpu Li , Christopher Newsome , David Russell , Thomas Kugler
- 申请人地址: JP TOKYO
- 专利权人: SEIKO EPSON CORPORATION
- 当前专利权人: SEIKO EPSON CORPORATION
- 当前专利权人地址: JP TOKYO
- 优先权: GBGB0512641.2 20050621
- 主分类号: B29C47/00
- IPC分类号: B29C47/00 ; B32B23/08
摘要:
A method of forming an electronic device on a substrate 10, comprising: embossing the substrate 10, surface treating the substrate so that unindented portions 11 repel a solution of a first material 60, and depositing a solution of the first material 60 in indentations 12 on the substrate 10 formed by the embossing. The substrate is then annealed so that level of the first material is the same as the surface of the substrate. The first material 60 in the indentations can then, for example, be used as the source and drain in the subsequent formation of a TFT.
公开/授权文献
- US07582509B2 Micro-embossing fabrication of electronic devices 公开/授权日:2009-09-01
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