It is an object of the present invention to provide a beam splitter providing a high-contrast image and preventing light from scattering, and a laser scanning microscope provided with the above, in which there is provided a high-quality probe coming in contact with an electrode pad of a semiconductor device, in which a foreign substance is not likely to attach, a configuration is not likely changed and a preferable electrical contact can be maintained for a long time. According to the present invention, a probe coming into contact with an electrode pad of a measurement object comprises a connection terminal part integrally formed and connected to a substrate, a contact part having a tapered configuration, and a supporting part which supports the contact part. The contact part extending from an end of the supporting part has a sectional configuration which shares at least one side face with the supporting part.