发明申请
- 专利标题: Spin-coating apparatus and coated substrates prepared using the same
- 专利标题(中): 旋涂装置和使用其制备的涂布基材
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申请号: US11297635申请日: 2005-12-09
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公开(公告)号: US20070006804A1公开(公告)日: 2007-01-11
- 发明人: Tae-Sik Kang , Seongkeun Lee , Youngjun Hong
- 申请人: Tae-Sik Kang , Seongkeun Lee , Youngjun Hong
- 优先权: KR10-2004-0104504 20041210
- 主分类号: B05C13/02
- IPC分类号: B05C13/02 ; H01L29/12
摘要:
Provided is a spin coating apparatus having a ring-shaped or polygonal auxiliary member for use in manufacture of a coated substrate via spin coating, wherein the auxiliary member is positioned adjacent to the side of a substrate for coating, within a range of a spaced distance of 0.03 to 0.8 mm and a range of a height deviation of less than 0.1 mm, upon mounting the substrate. When a surface of a substrate for coating is spin coated with a coating agent using the apparatus of the present invention, it is possible to eliminate or effectively reduce a ski-jump phenomenon at end portions of a coated substrate occurring when spin coating is performed, thereby resulting in uniform coating of a coating solution on the substrate, and it is also possible to effectively decrease contamination of the substrate for coating due to inflow or stay of the remaining coating agent.
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