Spin-coating apparatus and coated substrates prepared using the same
    1.
    发明授权
    Spin-coating apparatus and coated substrates prepared using the same 失效
    旋涂装置和使用其制备的涂布基材

    公开(公告)号:US07632352B2

    公开(公告)日:2009-12-15

    申请号:US11297635

    申请日:2005-12-09

    IPC分类号: B05C11/02 B05C13/02 H01L29/12

    摘要: Provided is a spin coating apparatus having a ring-shaped or polygonal auxiliary member for use in manufacture of a coated substrate via spin coating, wherein the auxiliary member is positioned adjacent to the side of a substrate for coating, within a range of a spaced distance of 0.03 to 0.8 mm and a range of a height deviation of less than 0.1 mm, upon mounting the substrate.When a surface of a substrate for coating is spin coated with a coating agent using the apparatus of the present invention, it is possible to eliminate or effectively reduce a ski-jump phenomenon at end portions of a coated substrate occurring when spin coating is performed, thereby resulting in uniform coating of a coating solution on the substrate, and it is also possible to effectively decrease contamination of the substrate for coating due to inflow or stay of the remaining coating agent.

    摘要翻译: 本发明提供一种旋涂装置,其具有环形或多边形辅助构件,用于通过旋涂制造涂覆的基底,其中辅助构件邻近基底的涂层定位在间隔距离的范围内 为0.03〜0.8mm,高度偏差为0.1mm以下的范围。 当使用本发明的装置用涂布剂旋转涂布用基材的表面时,可以消除或有效地减少在进行旋涂时发生的涂布基材的端部处的滑雪跳跃现象, 从而导致涂布溶液在基材上的均匀涂布,并且还可以有效地减少由于剩余涂布剂的流入或停留而导致的涂布用基材的污染。

    Turnable device for spin-coating
    2.
    发明申请
    Turnable device for spin-coating 审中-公开
    可旋转装置用于旋涂

    公开(公告)号:US20060060134A1

    公开(公告)日:2006-03-23

    申请号:US11226338

    申请日:2005-09-15

    IPC分类号: B05C13/02 B05C13/00 B05C11/02

    CPC分类号: G11B7/266

    摘要: Provided is a turntable device for spin-coating a substrate having a central hole formed in the central portion thereof with an external coating material. The turntable device includes: a support unit having a flat surface with at least one vacuum hole which supply vacuum force to fixedly support the substrate thereon; an elastic body at the center of the support unit to be inserted into the central hole of the substrate, and closing the central hole by being elastically deformed due to an external force; and a pressing member disposed on the elastic body and pressing the elastic body to deform the elastic body elastically. Not having an additional element for closing the central hole of the substrate during spin-coating simplifies the apparatus and the coating process, and prevents the central portion of the substrate from being contaminated after the spin-coating.

    摘要翻译: 提供了一种转盘装置,用于在其中心部分形成有具有外部涂层材料的中心孔旋涂基板。 所述转盘装置包括:具有平坦表面的支撑单元,所述平坦表面具有至少一个真空孔,所述真空孔提供真空力以在其上固定地支撑所述基板; 所述支撑单元的中心处的弹性体被插入到所述基板的中心孔中,并且由于外力而弹性变形而闭合所述中心孔; 以及按压构件,设置在弹性体上并按压弹性体弹性体使弹性体变形。 在旋涂期间没有用于封闭基板的​​中心孔的附加元件简化了设备和涂覆过程,并且防止了基材的中心部分在旋涂之后被污染。

    Apparatus for optical disc spin-coating
    3.
    发明申请
    Apparatus for optical disc spin-coating 审中-公开
    光盘旋涂装置

    公开(公告)号:US20050281179A1

    公开(公告)日:2005-12-22

    申请号:US11154662

    申请日:2005-06-17

    IPC分类号: B29D17/00 G11B7/00 G11B7/26

    CPC分类号: G11B7/266 B29D17/005

    摘要: The present invention provides an apparatus for optical disc spin-coating that prevents leakage of a photocurable resin due to a capillary phenomenon by controlling a contact area between a cap and a disc so that contamination of the disc and manufacturing errors do not occur. Furthermore, the apparatus of the present invention can manufacture an optical disc having a central portion which is not contaminated by a photocurable resin and in which bubbles are not generated. In addition, the apparatus may further include a vacuum hole formed in the turntable, which can be opened and closed independently from the opening and closing of a vacuum hole formed in the central axis of the turntable, to prevent the lifting of the optical disc when the cap is removed. As a result, operability and the manufacturing efficiency of the apparatus can be increased significantly.

    摘要翻译: 本发明提供一种用于光盘旋涂的装置,其通过控制盖和盘之间的接触面积来防止毛细管现象引起的光固化树脂的泄漏,从而不会发生盘的污染和制造误差。 此外,本发明的装置可以制造具有不被光固化树脂污染的中心部分并且不产生气泡的光盘。 此外,该设备还可以包括形成在转盘中的真空孔,其可以独立于形成在转台的中心轴线上的真空孔的打开和关闭而被打开和关闭,以防止在光盘的提升时 盖子被移除。 结果,可以显着提高装置的可操作性和制造效率。

    Spin-coating apparatus and coated substrates prepared using the same
    4.
    发明申请
    Spin-coating apparatus and coated substrates prepared using the same 失效
    旋涂装置和使用其制备的涂布基材

    公开(公告)号:US20070006804A1

    公开(公告)日:2007-01-11

    申请号:US11297635

    申请日:2005-12-09

    IPC分类号: B05C13/02 H01L29/12

    摘要: Provided is a spin coating apparatus having a ring-shaped or polygonal auxiliary member for use in manufacture of a coated substrate via spin coating, wherein the auxiliary member is positioned adjacent to the side of a substrate for coating, within a range of a spaced distance of 0.03 to 0.8 mm and a range of a height deviation of less than 0.1 mm, upon mounting the substrate. When a surface of a substrate for coating is spin coated with a coating agent using the apparatus of the present invention, it is possible to eliminate or effectively reduce a ski-jump phenomenon at end portions of a coated substrate occurring when spin coating is performed, thereby resulting in uniform coating of a coating solution on the substrate, and it is also possible to effectively decrease contamination of the substrate for coating due to inflow or stay of the remaining coating agent.

    摘要翻译: 本发明提供一种旋涂装置,其具有环形或多边形辅助构件,用于通过旋涂制造涂覆的基底,其中辅助构件邻近基底的涂层定位在间隔距离的范围内 为0.03〜0.8mm,高度偏差为0.1mm以下的范围。 当使用本发明的装置用涂布剂旋转涂布用基材的表面时,可以消除或有效地减少在进行旋涂时发生的涂布基材的端部处的滑雪跳跃现象, 从而导致涂布溶液在基材上的均匀涂布,并且还可以有效地减少由于剩余涂布剂的流入或停留而导致的涂布用基材的污染。

    Apparatus for attaching and detaching cap for optical disc spin-coating, apparatus for optical disc spin-coating comprising the same, method of manufacturing optical disc using the apparatus for attaching and detaching cap for optical disc spin-coating
    5.
    发明申请
    Apparatus for attaching and detaching cap for optical disc spin-coating, apparatus for optical disc spin-coating comprising the same, method of manufacturing optical disc using the apparatus for attaching and detaching cap for optical disc spin-coating 审中-公开
    用于安装和拆卸用于光盘旋涂的盖的装置,包括其的用于光盘旋涂的装置,使用用于安装和拆卸用于光盘旋涂的盖的装置制造光盘的方法

    公开(公告)号:US20050287291A1

    公开(公告)日:2005-12-29

    申请号:US11154693

    申请日:2005-06-17

    IPC分类号: B05D3/12 B05D5/06 G11B7/26

    CPC分类号: G11B7/266

    摘要: Provided are an apparatus for attaching and detaching a cap for optical disc spin-coating that can be easily attached to and detached from the cap for covering a center hole of an optical disc by including a permanent magnet when contaminated by a photocurable resin, an apparatus for spin-coating including the same, and a method of manufacturing an optical disc using the apparatus for attaching and detaching a cap for optical disc spin-coating. By using the apparatus for attaching and detaching a cap for optical disc spin-coating, the cap can be easily attached to and detached from the optical disc before and after the spin coating even when the viscosity of the photocurable resin is high. In addition, the use of the apparatus for optical disc spin coating and the method of manufacturing the optical disc results in high manufacturing efficiency.

    摘要翻译: 提供一种用于安装和拆卸用于光盘旋涂的盖的装置,其可以容易地附接到盖上并从盖中拆下,以便在被光固化树脂污染时包括永磁体,用于覆盖光盘的中心孔;装置 用于包括其的旋涂,以及使用该装置来制造光盘的方法,所述装置用于安装和拆卸用于光盘旋涂的盖。 通过使用用于安装和拆卸用于光盘旋转涂层的盖的装置,即使当光固化树脂的粘度高时,也可以容易地在旋涂之前和之后将盖附着到光盘上并从光盘上拆下。 此外,使用光盘旋涂装置和制造光盘的方法导致高制造效率。

    Apparatus for optical disc spin-coating and method of coating optical disc
    6.
    发明授权
    Apparatus for optical disc spin-coating and method of coating optical disc 失效
    光盘旋涂装置及光盘涂布方法

    公开(公告)号:US07288154B2

    公开(公告)日:2007-10-30

    申请号:US11154699

    申请日:2005-06-17

    IPC分类号: B05C11/02 B05C21/00 G11B23/00

    CPC分类号: G11B7/266

    摘要: There is provided an apparatus for optical disc spin-coating, comprising a cap having a tapered protruding portion or a recess in its central lower portion; a turntable for rotation that has a tapered recess or protruding portion formed in an end of its central axis that is inserted into a center hole of an optical disc, wherein the tapered recess or protruding portion of the turntable is coupled with the tapered protruding portion or recess of the cap in a convexo-concave structure; and a vacuum hole formed in an optical disc support of the turntable. When the cap is eccentrically placed on the optical disc, the cap can be easily attached. In addition, the cap can be easily detached from the optical disc by using vacuum pressure. As a result, the operability and manufacturing efficiency can be increased.

    摘要翻译: 提供了一种用于光盘旋涂的装置,包括在其中央下部具有锥形突出部分或凹部的盖子; 用于旋转的转台,其具有形成在其中心轴线的端部中的锥形凹部或突出部分,所述锥形凹部或突出部分插入光盘的中心孔中,其中,所述转台的锥形凹部或突出部分与所述锥形突出部分 盖的凹陷为凹凸结构; 以及形成在转台的光盘支架中的真空孔。 当盖子偏心地放置在光盘上时,可以容易地安装盖子。 此外,通过使用真空压力可以容易地将盖从光盘分离。 结果,可以提高可操作性和制造效率。

    Apparatus for optical disc spin-coating and method of coating optical disc
    7.
    发明申请
    Apparatus for optical disc spin-coating and method of coating optical disc 失效
    光盘旋涂装置及光盘涂布方法

    公开(公告)号:US20050281180A1

    公开(公告)日:2005-12-22

    申请号:US11154699

    申请日:2005-06-17

    IPC分类号: G11B7/00 G11B7/26

    CPC分类号: G11B7/266

    摘要: There is provided an apparatus for optical disc spin-coating, comprising a cap having a tapered protruding portion or a recess in its central lower portion; a turntable for rotation that has a tapered recess or protruding portion formed in an end of its central axis that is inserted into a center hole of an optical disc, wherein the tapered recess or protruding portion of the turntable is coupled with the tapered protruding portion or recess of the cap in a convexo-concave structure; and a vacuum hole formed in an optical disc support of the turntable. When the cap is eccentrically placed on the optical disc, the cap can be easily attached. In addition, the cap can be easily detached from the optical disc by using vacuum pressure. As a result, the operability and manufacturing efficiency can be increased.

    摘要翻译: 提供了一种用于光盘旋涂的装置,包括在其中央下部具有锥形突出部分或凹部的盖子; 用于旋转的转台,其具有形成在其中心轴线的端部中的锥形凹部或突出部分,所述锥形凹部或突出部分插入光盘的中心孔中,其中,所述转台的锥形凹部或突出部分与所述锥形突出部分 盖的凹陷为凹凸结构; 以及形成在转台的光盘支架中的真空孔。 当盖子偏心地放置在光盘上时,可以容易地安装盖子。 此外,通过使用真空压力可以容易地将盖从光盘分离。 结果,可以提高可操作性和制造效率。

    Spin coating apparatus and coated substrate manufactured using the same
    8.
    发明申请
    Spin coating apparatus and coated substrate manufactured using the same 审中-公开
    旋涂装置和使用其制造的涂布基板

    公开(公告)号:US20050039675A1

    公开(公告)日:2005-02-24

    申请号:US10921145

    申请日:2004-08-19

    摘要: A spin coating apparatus is provided. The spin coating apparatus includes a ring-shaped or polygonal member. An upper portion of the ring-shaped or polygonal member has an inclined portion extending downward and outward, and an inner portion of the inclined portion is adjacent to or in contact with an outer edge of a substrate. An inner side surface of the ring-shaped or polygonal member is inclined downward and outward. When a surface of the substrate is coated with a coating solution using the spin coating apparatus, a ski-jump phenomenon occurring at an outer edge of the substrate can be reduced and contamination of the substrate due to the coating solution can be prevented.

    摘要翻译: 提供旋涂装置。 旋涂装置包括环形或多边形构件。 环形或多边形构件的上部具有向下和向外延伸的倾斜部分,并且倾斜部分的内部部分与衬底的外边缘相邻或接触。 环形或多边形构件的内侧表面向下和向外倾斜。 当使用旋转涂布装置涂覆涂布溶液的基板的表面时,可以减少在基板的外缘发生的滑跳现象,并且可以防止由于涂布溶液引起的基板的污染。