发明申请
US20070006806A1 Wafer Support Tool for Heat Treatment and Heat Treatment Apparatus 有权
用于热处理和热处理设备的晶片支撑工具

  • 专利标题: Wafer Support Tool for Heat Treatment and Heat Treatment Apparatus
  • 专利标题(中): 用于热处理和热处理设备的晶片支撑工具
  • 申请号: US10549805
    申请日: 2004-03-22
  • 公开(公告)号: US20070006806A1
    公开(公告)日: 2007-01-11
  • 发明人: Masayuki Imai
  • 申请人: Masayuki Imai
  • 优先权: JP2003-085137 20030326
  • 国际申请: PCT/JP04/03858 WO 20040322
  • 主分类号: B05B5/025
  • IPC分类号: B05B5/025
Wafer Support Tool for Heat Treatment and Heat Treatment Apparatus
摘要:
The present invention provides a wafer support tool for heat treatment easy in working and capable of realizing reduction in cost without generating damages or slip dislocations that would be otherwise caused by high temperature heat treatment and a heat treatment apparatus. The present invention is directed to a wafer support tool for heat treatment comprising: a plurality of wafer support members for supporting a wafer to be heat treated; and a support member holder for holding the wafer support members, wherein the wafer support members each has a contact portion with the wafer, at least one of the contact portions being movable relative to the support member holder.
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