摘要:
A method for manufacturing an SOI wafer includes performing a flattening heat treatment on an SOI wafer under an atmosphere containing an argon gas, in which conditions of SOI wafer preparation are set so that a thickness of an SOI layer of the SOI wafer to be subjected to the flattening heat treatment is 1.4 or more times thicker than that of a BOX layer, and the thickness of the SOI layer is reduced to less than a thickness 1.4 times the thickness of the BOX layer by performing a sacrificial oxidation treatment on the SOI layer of the SOI wafer after the flattening heat treatment.
摘要:
A method for manufacturing an SOI wafer includes performing a flattening heat treatment on an SOI wafer under an atmosphere containing an argon gas, in which conditions of SOI wafer preparation are set so that a thickness of an SOI layer of the SOI wafer to be subjected to the flattening heat treatment is 1.4 or more times thicker than that of a BOX layer, and the thickness of the SOI layer is reduced to less than a thickness 1.4 times the thickness of the BOX layer by performing a sacrificial oxidation treatment on the SOI layer of the SOI wafer after the flattening heat treatment.
摘要:
A method of manufacturing an SOI wafer includes a bonding step, a thinning and a bonding annealing step. Assuming refractive index n1 of SiO2 as 1.5, refractive index n2 of Si as 3.5, and optical thickness tOP of the silicon oxide film 2 and the SOI layer 15 in the infrared wavelength region as tOP=n1×t1+n2×t2, the thickness t1 of the silicon oxide film 2 and thickness t2 of the SOI layer so as to satisfy a relation of 0.1λ
摘要:
A lower back supporter including a pair of flat anchor parts that come into contact with the lower back of a wearer with a specified space in between, a pair of anchor belts that wrap around the abdomen with the end portions connected to each other, a first and second support belt that cross over each other on the back, and a connecting belt that connects the anchor parts. The inner side surface of the anchor part comprising a non-slip material that closely contacts the skin of the wearer, and the outer side surface comprising a material that fastens to surface fasteners. After the anchor belts are put on, operation belts connected to the first and second support belts are pulled, the surface fasteners are fastened to the outer side surfaces of the anchor parts, applying tensile force between the anchor parts in closely contact to the lower back.
摘要:
The present invention provides a wafer support tool for heat treatment easy in working and capable of realizing reduction in cost without generating damages or slip dislocations that would be otherwise caused by high temperature heat treatment and a heat treatment apparatus. The present invention is directed to a wafer support tool for heat treatment comprising: a plurality of wafer support members for supporting a wafer to be heat treated; and a support member holder for holding the wafer support members, wherein the wafer support members each has a contact portion with the wafer, at least one of the contact portions being movable relative to the support member holder.
摘要:
There is provided a brazing method which makes it possible to rationally perform not only the brazing between a metal member such as a stator made of a magnetic material and a metal member such as a guide pipe made of a non-magnetic material but also the magnetic annealing of these metal members. By making use of a brazing material (90) which can be fused at a lower temperature than a magnetic annealing temperature of metal member (33), the metal member such as a stator made of a magnetic material and the metal member (35) such as a guide pipe made of a non-magnetic material are heated to a predetermined temperature in a furnace to perform the magnetic annealing of the metal member (33) concurrent with the brazing of these metal members.
摘要:
The sensitivity of a pressure-sensitive element in a pressure-sensitive part of a control valve for variable-capacity compressor is made adjustable by means of an adjusting screw provided so as to permit an adjustment of forward and backward movement with respect to a frame supporting the pressure-sensitive part. The adjusting screw is rotated by engaging an engagement part, which is annexed to a coil assembly constituting a solenoid excitation part, against the adjusting screw thereby to operate the coil assembly.
摘要:
A valve element disposed in the valve chamber of a control valve body of a control valve for variable capacity compressors performs opening and closing operations by a plunger. The upper end of the valve element of this control valve body is inserted in the pressure chamber, while the lower end of the valve element is inserted in the plunger chamber of the solenoid excitation part. And the plunger chamber and the pressure chamber communicate with each other through a cancel hole formed in this valve element.
摘要:
A solenoid operated valve 10′ comprises a coil 21, a suction element 24, a plunger 31, a spring 25, a valve member 26, a bobbin 22, a housing 27 and a cap 28, wherein the plunger 31 is moved toward the suction element 24 when electricity is supplied to the coil 21. A pipe sleeve 30 is formed as a deep-drawn integrated pipe with a bottom, which is inserted to the inner side of the bobbin 22, and to which the suction element 24 is inserted and fixed. The plunger 31 is slidably inserted to the pipe sleeve 30. The valve member fixed to the end of plunger 31 opens or closes a valve opening 32. A cylindrical filter is fit to the outer peripheral of a flow-in opening 33, and assembled to a corresponding member.
摘要:
A control valve for a variable capacity compressor; wherein an opening degree of a valve member disposed in a coolant gas passage for communicating a discharge pressure region of the variable capacity compressor with a crankcase thereof is made adjustable by a magnetization action of a solenoid, thereby causing an inclination angle of a wobble plate to change and also causing a discharging capacity of the compressor to change; and which is characterized in that the main valve body comprises a solenoid, a pressure sensitive chamber provided with bellows and a valve chamber provided with the valve member, and that the solenoid is provided with a plunger connected with one end of a stem, whose other end of the stem being detachably contacted with a stopper of the bellows, and the other end of the plunger being linked to a rod to be contacted with the valve member.