发明申请
- 专利标题: MEMS switch and method for manufacturing the same
- 专利标题(中): MEMS开关及其制造方法
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申请号: US11472312申请日: 2006-06-22
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公开(公告)号: US20070012654A1公开(公告)日: 2007-01-18
- 发明人: Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Duck-hwan Kim , Yun-kwon Park , Hee-moon Jeong , Young-tack Hong , Che-heung Kim , Seok-chul Yun , Kuang-woo Nam
- 申请人: Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Duck-hwan Kim , Yun-kwon Park , Hee-moon Jeong , Young-tack Hong , Che-heung Kim , Seok-chul Yun , Kuang-woo Nam
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 优先权: KR10-2005-0064798 20050718
- 主分类号: C23F1/00
- IPC分类号: C23F1/00 ; H01B13/00
摘要:
A MEMS switch includes a lower substrate having a signal line on an upper surface of the lower substrate; an upper substrate, having a cavity therein, disposed apart from the upper surface of the lower substrate by a distance, and having a membrane layer on a lower surface of the upper substrate; a bimetal layer formed in the cavity of the upper substrate on the membrane layer; a heating layer formed on a lower surface of the membrane layer; and a contact member formed on a lower surface of the heating layer. The contact member can come into contact with or separate from the signal line. A method for manufacturing the MEMS switch includes preparing the upper and lower substrates and combining them so that a surface having the signal line faces a surface having the contact member and the upper and lower substrates are disposed apart by a distance.
公开/授权文献
- US07619289B2 MEMS switch and method for manufacturing the same 公开/授权日:2009-11-17
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