发明申请
- 专利标题： Method for cleaning disk-shape glass substrate and magnetic disk
- 专利标题（中）： 盘状玻璃基板和磁盘的清洗方法
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申请号： US11486010申请日： 2006-07-14
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公开(公告)号： US20070017547A1公开(公告)日： 2007-01-25
- 发明人: Osamu Miyahara , Kazuo Mannami , Kuniyuki Someya , Tsutomu Maruyama
- 申请人： Osamu Miyahara , Kazuo Mannami , Kuniyuki Someya , Tsutomu Maruyama
- 申请人地址： JP Chiyoda-ku 100-8405
- 专利权人： ASAHI GLASS COMPANY, LIMITED
- 当前专利权人： ASAHI GLASS COMPANY, LIMITED
- 当前专利权人地址： JP Chiyoda-ku 100-8405
- 优先权： JP2005-208684 20050719
- 主分类号： B08B3/12
- IPC分类号： B08B3/12 ; C23G1/00 ; B08B7/00
摘要：
A method for cleaning a disk-shape glass substrate, which comprises rotating the disk-shape glass substrate on its center with its main surface vertical, and making a cleaning fluid irradiated with ultrasonic waves run down on the outer peripheral edge surface of the rotating glass substrate.
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