The present invention provides a process for producing fine metal oxide particles efficiently and simply. The process for producing fine metal oxide particles of the present invention comprises subjecting a gaseous organometallic compound to combustion in a gas phase in the presence of an oxidizing substance; mixing a gaseous organometallic compound with an oxidizing substance to prepare a mixture and subjecting the mixture to combustion; mixing an organometallic compound solution with an oxidizing substance to prepare a mixture making the mixture into a gaseous state and then subjecting the gaseous mixture to combustion; or mixing an oxidizing substance with a gaseous organometallic compound prepared by vaporizing an organometallic compound solution to prepare a mixture and subjecting the mixture to combustion.