发明申请
US20070023085A1 Methods, apparatus and computer program products for controlling a volume of liquid in semiconductor processing based on reflected optical radiation
有权
用于基于反射光辐射来控制半导体处理中的液体体积的方法，装置和计算机程序产品
- 专利标题： Methods, apparatus and computer program products for controlling a volume of liquid in semiconductor processing based on reflected optical radiation
- 专利标题（中）： 用于基于反射光辐射来控制半导体处理中的液体体积的方法，装置和计算机程序产品
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申请号： US11194183申请日： 2005-08-01
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公开(公告)号： US20070023085A1公开(公告)日： 2007-02-01
- 发明人: Peter Andrews , Gerald Negley
- 申请人： Peter Andrews , Gerald Negley
- 主分类号： G05D9/12
- IPC分类号： G05D9/12
摘要：
A method of controlling dispensing of a liquid can include detecting a predetermined shape of a surface of a liquid in a container by reflecting optical radiation from the surface to control a volume of the liquid dispensed into the container. Related apparatus and computer program products are also disclosed.
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