发明申请
US20070023925A1 Semiconductor element with conductive bumps and fabrication method thereof
审中-公开
具有导电凸块的半导体元件及其制造方法
- 专利标题: Semiconductor element with conductive bumps and fabrication method thereof
- 专利标题(中): 具有导电凸块的半导体元件及其制造方法
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申请号: US11414275申请日: 2006-04-27
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公开(公告)号: US20070023925A1公开(公告)日: 2007-02-01
- 发明人: Chun-Chi Ke , Kook-Jui Tai , Chien-Ping Huang
- 申请人: Chun-Chi Ke , Kook-Jui Tai , Chien-Ping Huang
- 申请人地址: TW Taichung
- 专利权人: Siliconware Precision Industries Co., Ltd.
- 当前专利权人: Siliconware Precision Industries Co., Ltd.
- 当前专利权人地址: TW Taichung
- 优先权: TW094125224 20050726
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/44 ; H01L23/48
摘要:
A semiconductor device and a fabrication method thereof are provided. A first passivation layer and a second passivation layer are applied on a semiconductor substrate having at least one bond pad, with the bond pad being exposed. A first metallic layer is formed on the second passivation layer and electrically connected to the bond pad. A third passivation layer is applied on the first metallic layer and exposes a portion of the first metallic layer. A second metallic layer is formed on the third passivation layer and electrically connected to the exposed portion of the first metallic layer. A fourth passivation layer is applied on the second metallic layer and has an opening corresponding in position to the bond pad, allowing a portion of the second metallic layer to be exposed via the opening, such that a solder bump is formed on the exposed portion of the second metallic layer.
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