发明申请
- 专利标题: LASER TRACKING INTERFEROMETER
- 专利标题(中): 激光跟踪干涉仪
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申请号: US11458533申请日: 2006-07-19
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公开(公告)号: US20070024861A1公开(公告)日: 2007-02-01
- 发明人: Shinichirou Yanaka , Makoto Abe , Shinichi Hara , Naoyuki Taketomi
- 申请人: Shinichirou Yanaka , Makoto Abe , Shinichi Hara , Naoyuki Taketomi
- 申请人地址: JP Kawasaki-shi
- 专利权人: MITUTOYO CORPORATION
- 当前专利权人: MITUTOYO CORPORATION
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2005-216110 20050726
- 主分类号: G01B11/02
- IPC分类号: G01B11/02
摘要:
A laser tracking interferometer; a carriage rotatable about a center of the reference sphere; a laser interferometer that provides a retroreflector displacement signal, and a displacement gage that provides a displacement signal. A data processing apparatus computes displacement of the retroreflector with respect to the reference sphere. A position sensitive detector provides a position signal corresponding to the amount of deviation of a laser beam when the laser beam is reflected off the retroreflector back into the laser interferometer and deviated in a direction orthogonal to its optical axis. A controller controls rotation of the carriage based on the position signal from the position detector so that the amount of deviation becomes zero.
公开/授权文献
- US07388674B2 Laser tracking interferometer 公开/授权日:2008-06-17
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