发明申请
- 专利标题： NANO-TIP FABRICATION BY SPATIALLY CONTROLLED ETCHING
- 专利标题（中）： 通过空间控制蚀刻的纳米技术制造
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申请号： US11383909申请日： 2006-05-17
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公开(公告)号： US20070025907A1公开(公告)日： 2007-02-01
- 发明人: Mohamed Rezeq , Jason Pitters , Robert Wolkow
- 申请人： Mohamed Rezeq , Jason Pitters , Robert Wolkow
- 申请人地址： CA Ottawa
- 专利权人： NATIONAL RESEARCH COUNCIL OF CANADA AND UNIVERSITY OF ALBERTA
- 当前专利权人： NATIONAL RESEARCH COUNCIL OF CANADA AND UNIVERSITY OF ALBERTA
- 当前专利权人地址： CA Ottawa
- 主分类号： D01F9/12
- IPC分类号： D01F9/12 ; D01C5/00
摘要：
A method of fabricating nano-tips involves placing a precursor nanotip with an apex and shank in a vacuum chamber; optionally applying an electric field to the precursor nanotip to remove oxide and other contaminant species; subsequently admitting an etchant gas to the vacuum chamber to perform field assisted etching by preferential adsorption of the etchant gas on the shank; and gradually reducing the applied electric field to confine the adsorption of the etchant gas to the shank as etching progresses.
公开/授权文献
- US07431856B2 Nano-tip fabrication by spatially controlled etching 公开/授权日：2008-10-07
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