发明申请
- 专利标题: Method of forming non-conformal layers
- 专利标题(中): 形成非保形层的方法
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申请号: US11375588申请日: 2006-03-13
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公开(公告)号: US20070026540A1公开(公告)日: 2007-02-01
- 发明人: Sebastian Nooten , Jan Maes , Steven Marcus , Glen Wilk , Petri Raisanen , Kai-Erik Elers
- 申请人: Sebastian Nooten , Jan Maes , Steven Marcus , Glen Wilk , Petri Raisanen , Kai-Erik Elers
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; B05C11/00 ; C23C16/00 ; H01L21/31
摘要:
In one aspect, non-conformal layers are formed by variations of plasma enhanced atomic layer deposition, where one or more of pulse duration, separation, RF power on-time, reactant concentration, pressure and electrode spacing are varied from true self-saturating reactions to operate in a depletion-effect mode. Deposition thus takes place close to the substrate surface but is controlled to terminate after reaching a specified distance into openings (e.g., deep DRAM trenches, pores, etc.). Reactor configurations that are suited to such modulation include showerhead, in situ plasma reactors, particularly with adjustable electrode spacing. In another aspect, alternately and sequentially contacting a substrate, the substrate including openings, with at least two different reactants, wherein an under-saturated dose of at least one of the reactants has been predetermined and the under-saturated dose is provided uniformly across the substrate surface, deposits a film that less than fully covers surfaces of the openings, leading to depletion effects in less accessible regions on the substrate surface
公开/授权文献
- US07608549B2 Method of forming non-conformal layers 公开/授权日:2009-10-27