发明申请
US20070040207A1 Electronic devices including dielectric layers with different densities of titanium
审中-公开
包括具有不同密度的钛的电介质层的电子器件
- 专利标题: Electronic devices including dielectric layers with different densities of titanium
- 专利标题(中): 包括具有不同密度的钛的电介质层的电子器件
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申请号: US11586291申请日: 2006-10-25
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公开(公告)号: US20070040207A1公开(公告)日: 2007-02-22
- 发明人: Gab-jin Nam , Seung-hwan Lee , Ki-chul Kim , Jae-soon Lim , Sung-tae Kim , Young-sun Kim
- 申请人: Gab-jin Nam , Seung-hwan Lee , Ki-chul Kim , Jae-soon Lim , Sung-tae Kim , Young-sun Kim
- 优先权: KR2002-0063024 20021016
- 主分类号: H01L29/00
- IPC分类号: H01L29/00
摘要:
Methods of forming an electronic device include providing a fist electrode, providing a dielectric oxide layer on the first electrode, and providing a second electrode on the dielectric oxide layer so that the dielectric oxide layer is between the first and second electrodes. More particularly, a first portion of the dielectric oxide layer adjacent the first electrode can have a first density of titanium, and a second portion of the dielectric oxide layer opposite the first electrode can have a second density of titanium different than the first density. Related structures are also discussed.
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