- 专利标题: Bottom conductor for integrated MRAM
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申请号: US11215276申请日: 2005-08-30
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公开(公告)号: US20070045758A1公开(公告)日: 2007-03-01
- 发明人: Wei Cao , Chyu-Jiuh Torng , Cheng Horng , Ruying Tong , Chen-Jung Chien , Liubo Hong
- 申请人: Wei Cao , Chyu-Jiuh Torng , Cheng Horng , Ruying Tong , Chen-Jung Chien , Liubo Hong
- 专利权人: MagIC Technologies, Inc.
- 当前专利权人: MagIC Technologies, Inc.
- 主分类号: H01L43/00
- IPC分类号: H01L43/00
摘要:
A structure that is well suited to connecting an MTJ device to a CMOS integrated circuit is described. It is built out of three layers. The bottom layer serves as a seed layer for the center layer, which is alpha tantalum, while the third, topmost, layer is selected for its smoothness, its compatibility with the inter-layer dielectric materials, and its ability to protect the underlying tantalum. A method for its formation is also described.
公开/授权文献
- US07265404B2 Bottom conductor for integrated MRAM 公开/授权日:2007-09-04
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