Invention Application
US20070046954A1 Method of verifying consistent measurement between a plurality of CD metrology tools
审中-公开
验证多个CD测量工具之间的一致测量的方法
- Patent Title: Method of verifying consistent measurement between a plurality of CD metrology tools
- Patent Title (中): 验证多个CD测量工具之间的一致测量的方法
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Application No.: US11210113Application Date: 2005-08-24
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Publication No.: US20070046954A1Publication Date: 2007-03-01
- Inventor: Hugo Joseph Cramer , Erik Van Brederode
- Applicant: Hugo Joseph Cramer , Erik Van Brederode
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Main IPC: G01B11/14
- IPC: G01B11/14
Abstract:
A method of matching CD-SEM's to ensure consistent measurements over an installed base of SEM's is disclosed by measuring with each of a plurality of scanning electron microscopes the feature size of resist features in at least two positions on the substrate such that field-to-field variations, and reticle and exposure tool non-uniformities are efficiently suppressed in the matching result.
Information query
