发明申请
- 专利标题: Method and device for irradiating spots on a layer
- 专利标题(中): 用于在层上照射斑点的方法和装置
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申请号: US10539313申请日: 2003-11-20
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公开(公告)号: US20070052936A1公开(公告)日: 2007-03-08
- 发明人: Jacobus Neijzen , Helmar Van Santen
- 申请人: Jacobus Neijzen , Helmar Van Santen
- 申请人地址: NL EINDHOVEN 5621 BA
- 专利权人: KONINKLIJKE PHILIPS ELECTRONICS N.V.
- 当前专利权人: KONINKLIJKE PHILIPS ELECTRONICS N.V.
- 当前专利权人地址: NL EINDHOVEN 5621 BA
- 优先权: EP02080392.0 20021219
- 国际申请: PCT/IB03/05344 WO 20031120
- 主分类号: G03B23/04
- IPC分类号: G03B23/04
摘要:
For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the lens is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the lens nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit. At least a portion of the liquid fills up a recess through which the radiation irradiates the spot.
公开/授权文献
- US07514699B2 Method and device for irradiating spots on a layer 公开/授权日:2009-04-07
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