发明申请
- 专利标题: Methods and apparatus for a band to band transfer module
- 专利标题(中): 一种带对带传输模块的方法和装置
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申请号: US11521070申请日: 2006-09-13
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公开(公告)号: US20070061031A1公开(公告)日: 2007-03-15
- 发明人: Robert Lowrance , Eric Englhardt , Michael Rice , Vinay Shah , Sushant Koshti , Jeffrey Hudgens
- 申请人: Robert Lowrance , Eric Englhardt , Michael Rice , Vinay Shah , Sushant Koshti , Jeffrey Hudgens
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
A band to band transfer module according to the present invention may be used with a substrate carrier transport system, or other systems, to transfer substrate carriers (e.g., small lot substrate carriers) from one conveyor to another conveyor or between two points on the same conveyor. The transfers (e.g., pick and place) of the substrate carriers may be made between conveyors traveling at different speeds. Numerous other aspects and features are disclosed.
公开/授权文献
- US07577487B2 Methods and apparatus for a band to band transfer module 公开/授权日:2009-08-18
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