发明申请
US20070061031A1 Methods and apparatus for a band to band transfer module 有权
一种带对带传输模块的方法和装置

Methods and apparatus for a band to band transfer module
摘要:
A band to band transfer module according to the present invention may be used with a substrate carrier transport system, or other systems, to transfer substrate carriers (e.g., small lot substrate carriers) from one conveyor to another conveyor or between two points on the same conveyor. The transfers (e.g., pick and place) of the substrate carriers may be made between conveyors traveling at different speeds. Numerous other aspects and features are disclosed.
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