- 专利标题: Data representation relating to a non-sampled workpiece
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申请号: US11224388申请日: 2005-09-12
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公开(公告)号: US20070061032A1公开(公告)日: 2007-03-15
- 发明人: Steven Reeves , Michael McIntyre
- 申请人: Steven Reeves , Michael McIntyre
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
A method, apparatus, and a system for providing data representation associated with non-sampled workpieces. Measured metrology data relating to a first workpiece is received. Metrology data corresponding to a second workpiece is approximated based upon the metrology data relating to the first workpiece to provide a projected metrology data relating to the second workpiece.
公开/授权文献
- US07236848B2 Data representation relating to a non-sampled workpiece 公开/授权日:2007-06-26