发明申请
- 专利标题: Transistors including laterally extended active regions and methods of fabricating the same
- 专利标题(中): 包括横向延伸的有源区的晶体管及其制造方法
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申请号: US11387029申请日: 2006-03-22
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公开(公告)号: US20070063270A1公开(公告)日: 2007-03-22
- 发明人: Min-Hee Cho , Ji-Young Kim
- 申请人: Min-Hee Cho , Ji-Young Kim
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR2005-88333 20050922
- 主分类号: H01L29/94
- IPC分类号: H01L29/94
摘要:
A transistor includes a substrate and an isolation region disposed in the substrate. The isolation regions defines an active region comprising upper and lower active regions, the upper active region having a first width and the lower active region having a second width greater than the first width. An insulated gate electrode extends through the upper active region and into the lower active region. Source and drain regions are disposed in the active region on respective first and second sides of the insulated gate electrode. The insulated gate electrode may include an upper gate electrode disposed in the upper active region and a lower gate electrode disposed in the lower active region, wherein the lower gate electrode is wider than the upper gate electrode. Related fabrication methods are described.
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