发明申请
- 专利标题: Yttria sintered body and manufacturing method therefor
- 专利标题(中): 氧化钇烧结体及其制造方法
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申请号: US11504102申请日: 2006-08-15
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公开(公告)号: US20070066478A1公开(公告)日: 2007-03-22
- 发明人: Sachiyuki Nagasaka , Keiji Morita , Keisuke Watanabe
- 申请人: Sachiyuki Nagasaka , Keiji Morita , Keisuke Watanabe
- 专利权人: TOSHIBA CERAMICS CO., LTD.
- 当前专利权人: TOSHIBA CERAMICS CO., LTD.
- 优先权: JP2005-235619 20050816; JP2005-251085 20050831; JP2006-219550 20060811
- 主分类号: C04B35/505
- IPC分类号: C04B35/505
摘要:
To provide a yttria sintered body having an excellent corrosion resistance to halogen-based corrosive gases and plasma and an excellent thermal shock resistance, and adapted for use as a component member in manufacturing apparatuses for semiconductor and liquid crystal devices, particularly in a plasma process apparatus. A yttria sintered body including tungsten of an average particle size of 3 μm or less dispersed in the yttria so that a ratio of the tungsten relative to the yttria is ranging from 1 to 50% in terms of weight, and having an open pore rate of 0.2% or less and a thermal shock resistance by water submersion method of 200° C. or larger.
公开/授权文献
- US07476634B2 Yttria sintered body and manufacturing method therefor 公开/授权日:2009-01-13
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