- 专利标题: Group encapsulated dicing chuck
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申请号: US11604482申请日: 2006-11-27
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公开(公告)号: US20070068504A1公开(公告)日: 2007-03-29
- 发明人: Warren Farnworth , Tom Muntifering
- 申请人: Warren Farnworth , Tom Muntifering
- 主分类号: B28D1/04
- IPC分类号: B28D1/04
摘要:
A semiconductor wafer saw and method of using the same for dicing semiconductor wafers are disclosed comprising a wafer saw including variable lateral indexing capabilities and multiple blades. The wafer saw, because of its variable indexing capabilities, can dice wafers having a plurality of differently sized semiconductor devices thereon into their respective discrete components. In addition, the wafer saw with its multiple blades, some of which may be independently laterally or vertically movable relative to other blades, can more efficiently dice silicon wafers into individual semiconductor devices.
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