Invention Application
- Patent Title: Substrate carrier
- Patent Title (中): 基板载体
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Application No.: US11254427Application Date: 2005-10-20
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Publication No.: US20070068802A1Publication Date: 2007-03-29
- Inventor: Thomas Gebele , Oliver Heimel , Thomas Klug
- Applicant: Thomas Gebele , Oliver Heimel , Thomas Klug
- Priority: DE102005045717.7 20050924
- Main IPC: C23C14/00
- IPC: C23C14/00
Abstract:
The invention relates to a substrate carrier comprising two vertical plates and two horizontal plates. In order for the substrate during its transport through a sputter unit to be coated uniformly in its margin regions, a lever arrangement is provided between the two vertical plates. The lever arrangement comprises at least one horizontal web which under the effect of heat expands to a lesser degree than the horizontal plates.
Information query
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