利索-全球专利检索

  1. 登录
  2. 注册
发明申请
US20070068920A1 Bake unit, method for cooling heating plate used in the bake unit, apparatus and method for treating substrates with the bake unit 审中-公开
烘烤单元，用于在烘烤单元中使用的加热板的冷却方法，用烘烤单元处理基材的设备和方法

  • 专利标题： Bake unit, method for cooling heating plate used in the bake unit, apparatus and method for treating substrates with the bake unit
  • 专利标题（中）： 烘烤单元，用于在烘烤单元中使用的加热板的冷却方法，用烘烤单元处理基材的设备和方法
  • 申请号： US11274204
    申请日： 2005-11-16
  • 公开(公告)号： US20070068920A1
    公开(公告)日： 2007-03-29
  • 发明人: Hee-Young Kang , Sung-Hwan Yim
  • 申请人： Hee-Young Kang , Sung-Hwan Yim
  • 优先权： KR2005-90371 20050928
  • 主分类号： H05B3/68
  • IPC分类号： H05B3/68
Bake unit, method for cooling heating plate used in the bake unit, apparatus and method for treating substrates with the bake unit
摘要：
There is provided a method for cooling a heating plate used in a bake unit. According to the method, the heating plate is cooled with a temperature adjustment plate that is cooler than the heating plate by providing the temperature adjustment plate on the heating plate. The temperature adjustment plate is moved to the heating plate after the temperature adjustment plate is cooled by a cooling plate that is used for cooling a substrate.
摘要（中）：

提供了一种用于冷却在烘烤单元中使用的加热板的方法。 根据该方法，通过在加热板上设置温度调节板，通过比加热板更冷的温度调节板来冷却加热板。 在温度调节板被用于冷却基板的冷却板冷却后，将温度调节板移动到加热板。

信息查询
Global Dossier Espacenet
0/0