发明申请
- 专利标题: Power semiconductor component having a field electrode and method for producing this component
- 专利标题(中): 具有场电极的功率半导体部件及其制造方法
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申请号: US11521075申请日: 2006-09-14
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公开(公告)号: US20070069257A1公开(公告)日: 2007-03-29
- 发明人: Anton Mauder , Hans-Joachim Schulze
- 申请人: Anton Mauder , Hans-Joachim Schulze
- 申请人地址: AT Villach
- 专利权人: Infineon Technologies Austria AG
- 当前专利权人: Infineon Technologies Austria AG
- 当前专利权人地址: AT Villach
- 优先权: DE102005043916.0-33 20050914
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
A power semiconductor component includes a semiconductor body and a field electrode. The semiconductor body has a drift zone of a first conduction type and a further component defining a junction therebetween. The junction is configured to cause a space charge zone to propagate when a reverse voltage is applied to the junction. The field electrode is arranged adjacent to the drift zone, and is insulated from the semiconductor body by at least a dielectric layer. The dielectric layer has a first section and a second section, the first section arranged nearer to the junction and having a higher dielectric constant than the second section.
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