发明申请
US20070069331A1 Methods of forming electromigration and thermal gradient based fuse structures 有权
形成电迁移和基于热梯度的熔丝结构的方法

  • 专利标题: Methods of forming electromigration and thermal gradient based fuse structures
  • 专利标题(中): 形成电迁移和基于热梯度的熔丝结构的方法
  • 申请号: US11605119
    申请日: 2006-11-27
  • 公开(公告)号: US20070069331A1
    公开(公告)日: 2007-03-29
  • 发明人: Jose MaizJun HeMark Bohr
  • 申请人: Jose MaizJun HeMark Bohr
  • 主分类号: H01L29/00
  • IPC分类号: H01L29/00
Methods of forming electromigration and thermal gradient based fuse structures
摘要:
Methods of forming a microelectronic structure are described. Embodiments of those methods include forming a metallic fuse structure by forming at least one via on a first interconnect structure, lining the at least one via with a barrier layer, and then forming a second interconnect structure on the at least one via.
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