发明申请
US20070075428A1 Encapsulated damascene with improved overlayer adhesion 有权
具有改进的覆盖层附着力的封装的镶嵌

Encapsulated damascene with improved overlayer adhesion
摘要:
An integrated circuit device comprising a partially embedded and encapsulated damascene structure and method for forming the same to improve adhesion to an overlying dielectric layer, the integrated circuit device including a conductive material partially embedded in an opening formed in a dielectric layer; wherein said conductive material is encapsulated with a first barrier layer comprising sidewall and bottom portions and a second barrier layer covering a top portion, said conductive material and first barrier layer sidewall portions extending to a predetermined height above an upper surface of the dielectric layer to form a partially embedded damascene.
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