发明申请
- 专利标题: Encapsulated damascene with improved overlayer adhesion
- 专利标题(中): 具有改进的覆盖层附着力的封装的镶嵌
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申请号: US11241355申请日: 2005-09-30
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公开(公告)号: US20070075428A1公开(公告)日: 2007-04-05
- 发明人: Chao-Hsiung Wang , Ping-Kun Wu
- 申请人: Chao-Hsiung Wang , Ping-Kun Wu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 主分类号: H01L23/52
- IPC分类号: H01L23/52 ; H01L21/44
摘要:
An integrated circuit device comprising a partially embedded and encapsulated damascene structure and method for forming the same to improve adhesion to an overlying dielectric layer, the integrated circuit device including a conductive material partially embedded in an opening formed in a dielectric layer; wherein said conductive material is encapsulated with a first barrier layer comprising sidewall and bottom portions and a second barrier layer covering a top portion, said conductive material and first barrier layer sidewall portions extending to a predetermined height above an upper surface of the dielectric layer to form a partially embedded damascene.
公开/授权文献
- US07737556B2 Encapsulated damascene with improved overlayer adhesion 公开/授权日:2010-06-15
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