发明申请
- 专利标题: System and Method for the Probing of a Wafer
- 专利标题(中): 用于探测晶片的系统和方法
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申请号: US11551097申请日: 2006-10-19
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公开(公告)号: US20070080705A1公开(公告)日: 2007-04-12
- 发明人: Glenn Schuette , James Rousey , Curtis Miller
- 申请人: Glenn Schuette , James Rousey , Curtis Miller
- 申请人地址: US TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: US TX Dallas
- 主分类号: G01R31/26
- IPC分类号: G01R31/26
摘要:
According to one embodiment of the invention, a method for resuming the probing of a wafer includes identifying a data set associated with a wafer. The data set identifies at least one unprobed die supported on the surface of the wafer. The method also includes determining that the data set associated with the wafer is useable and generating a probe map of the wafer from the data set. The probe map identifies a physical position associated with each unprobed die supported on the surface of the wafer. The probe map and one or more probe commands are communicated to a probe module to drive the probe module in resuming the probe of the wafer.
公开/授权文献
- US07323899B2 System and method for resumed probing of a wafer 公开/授权日:2008-01-29
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