发明申请
US20070083021A1 Fluorocopolymer, method for its production and resist composition containing it
审中-公开
含氟共聚物，其生产方法和含有它的抗蚀剂组合物
- 专利标题： Fluorocopolymer, method for its production and resist composition containing it
- 专利标题（中）： 含氟共聚物，其生产方法和含有它的抗蚀剂组合物
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申请号： US11593549申请日： 2006-11-07
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公开(公告)号： US20070083021A1公开(公告)日： 2007-04-12
- 发明人: Masataka Eda , Yoko Takebe , Osamu Yokokoji
- 申请人： Masataka Eda , Yoko Takebe , Osamu Yokokoji
- 申请人地址： JP Tokyo
- 专利权人： ASAHI GLASS COMPANY, LIMITED
- 当前专利权人： ASAHI GLASS COMPANY, LIMITED
- 当前专利权人地址： JP Tokyo
- 优先权： JP2004-138230 20040507
- 主分类号： C08F236/16
- IPC分类号： C08F236/16
摘要：
A fluorocopolymer having units derived from a monomer unit formed by cyclopolymerization of a fluorinated diene and units derived from a monomer unit formed by cyclopolymerization of a functional group-containing fluorinated diene having a specific structure or a monomer unit formed by polymerization of an acrylic monomer having a specific structure, a method for its production, and a resist composition.