发明申请
- 专利标题: X-ray fluorescence spectrometer and program for use therewith
- 专利标题(中): X射线荧光光谱仪及其使用的程序
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申请号: US11581487申请日: 2006-10-17
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公开(公告)号: US20070086567A1公开(公告)日: 2007-04-19
- 发明人: Yoshiyuki Kataoka , Hisayuki Kohno , Masatsugu Kuraoka , Takashi Shoji , Yasujiro Yamada
- 申请人: Yoshiyuki Kataoka , Hisayuki Kohno , Masatsugu Kuraoka , Takashi Shoji , Yasujiro Yamada
- 专利权人: RIGAKU INDUSTRIAL CORPORATION
- 当前专利权人: RIGAKU INDUSTRIAL CORPORATION
- 优先权: JP2005-304664 20051019; JP2006-241760 20060906
- 主分类号: G01N23/223
- IPC分类号: G01N23/223 ; G01T1/36
摘要:
A scanning X-ray fluorescence spectrometer includes a quantitatively analyzing device (18) which calculates the concentration of hexavalent chrome based on the fact that the peak spectroscopic angle, at which the maximum intensity is attained in Cr-Kα line (22), changes depending on the ratio of the concentration of the hexavalent chrome vs. the concentration of the intensity of the total chrome. A plurality of detecting device (23) having different resolutions as a combination of a divergence slit (11), a spectroscopic device (6), a receiving slit (20) and a detector (8) is provided such that when the change of the peak spectroscopic angle is to be detected, a detecting device (23B) having a higher resolution than that of the detecting device (23A), which is selected when the concentration or the intensity of the total chrome is to be determined, is selected.
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