Invention Application
US20070087466A1 Integrated Microphone 有权
集成麦克风

Integrated Microphone
Abstract:
A method of forming a microphone having a variable capacitance first deposits high temperature deposition material on a die. The high temperature material ultimately forms structure that contributes to the variable capacitance. The method then forms circuitry on the die after depositing the deposition material. The circuitry is configured to detect the variable capacitance.
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