Invention Application
US20070089519A1 High-Q longitudinal block resonators with annexed platforms for mass sensing applications
有权
高Q纵向块谐振器具有用于质量感测应用的附加平台
- Patent Title: High-Q longitudinal block resonators with annexed platforms for mass sensing applications
- Patent Title (中): 高Q纵向块谐振器具有用于质量感测应用的附加平台
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Application No.: US11450186Application Date: 2006-06-09
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Publication No.: US20070089519A1Publication Date: 2007-04-26
- Inventor: Zhili Hao , Farrokh Ayazi
- Applicant: Zhili Hao , Farrokh Ayazi
- Assignee: Georgia Tech Research Corporation
- Current Assignee: Georgia Tech Research Corporation
- Main IPC: G01H11/00
- IPC: G01H11/00

Abstract:
Disclosed are sensing apparatus, such as mass sensors, comprising longitudinal block resonators having annexed platforms that offer the improved mass sensitivity at micron scale, high-Q in air, simplicity of fabrication, and improved reliability. Exemplary mass sensors comprise a central block separated from a substrate. Two annexed platforms are coupled to the central block by way of two separating beams that are separated from the substrate. One or more anchors are coupled to the central block by way of support beams that are separated from the substrate by insulating material. One or more transducers are provided for actuating and sensing vibration of the central block and the annexed platforms. The transducers may employ capacitive and piezoelectric drive and sense schemes.
Public/Granted literature
- US07819011B2 High-Q longitudinal block resonators with annexed platforms for mass sensing applications Public/Granted day:2010-10-26
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