发明申请
- 专利标题: Structure and method for thin film device with stranded conductor
- 专利标题(中): 具有绞线的薄膜器件的结构和方法
-
申请号: US11264321申请日: 2005-11-01
-
公开(公告)号: US20070096169A1公开(公告)日: 2007-05-03
- 发明人: Ping Mei , Hao Luo , Carl Taussig
- 申请人: Ping Mei , Hao Luo , Carl Taussig
- 主分类号: H01L29/80
- IPC分类号: H01L29/80
摘要:
Provided is a thin film device and an associated method of making a thin film device. For example, fabrication of an inverter thin film device is described. Moreover, a parallel spaced electrically conductive strips are provided upon a substrate. A functional material is deposited upon the conductive strips. A 3D structure is then provided upon the functional material, the 3D structure having a plurality of different heights, at least one height defining a first portion of the conductive strips to be bundled. The 3D structure and functional material are then etched to define a TFD disposed above the first portion of the conductive strips. The first portion of the conductive strips is bundled adjacent to the TFD.
公开/授权文献
信息查询
IPC分类: