发明申请
- 专利标题: Carbon nanotube with ZnO asperities
- 专利标题(中): 具有ZnO粗糙度的碳纳米管
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申请号: US11262439申请日: 2005-10-28
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公开(公告)号: US20070099441A1公开(公告)日: 2007-05-03
- 发明人: John Conley , Yoshi Ono , Lisa Stecker , Sheng Hsu , Josh Green , Lifeng Dong , Jun Jiao
- 申请人: John Conley , Yoshi Ono , Lisa Stecker , Sheng Hsu , Josh Green , Lifeng Dong , Jun Jiao
- 专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人: Sharp Laboratories of America, Inc.
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A ZnO asperity-covered carbon nanotube (CNT) device has been provided, along with a corresponding fabrication method. The method comprises: forming a substrate; growing CNTs from the substrate; conformally coating the CNTs with ZnO; annealing the ZnO-coated CNTs; and, forming ZnO asperities on the surface of the CNTs in response to the annealing. In one aspect, the ZnO asperities have a density in the range of about 100 to 1000 ZnO asperities per CNT. The density is dependent upon the deposited ZnO film thickness and annealing parameters. The CNTs are conformally coating with ZnO using a sputtering, chemical vapor deposition (CVD), spin-on, or atomic layer deposition (ALD). For example, an ALD process can be to deposit a layer of ZnO over the CNTs having a thickness in the range of 1.2 to 200 nanometers (nm).
公开/授权文献
- US07462499B2 Carbon nanotube with ZnO asperities 公开/授权日:2008-12-09
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